1.

Conference Proceedings
Conference Proceedings
1. QUASI-STOICHIOMETRIC SILICON NITRIDE THIN FILMS DEPOSITED BY REMOTE PLASMA-ENHANCED CHEMICAL-VAPOR DEPOSITION
Lucovsky, G. ; Ma, Y. ; He, S.S. ; Yasuda, T. ; Stephens, D.J. ; Habermehl, S.
Pub. info.: Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.33-38,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 284
2.

Conference Proceedings
Conference Proceedings
2. ELECTRICAL PROPERTIES OF OXIDE-NITRIDE-OXIDE, ONO, HETEROSTRUCTURES FABRICATED BY LOW TEMPERATURE REMOTE PECVD
Ma, Y. ; Yasuda, T. ; Chen, Y.L. ; Lucovsky, G. ; Maher, D.M.
Pub. info.: Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.147-152,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 284
3.

Conference Proceedings
Conference Proceedings
3. HIGH CHANNEL MOBILITY a-Si:H THIN FILM TRANSISTORS WITH OXIDE-NITRIDE DIELECTRICS
He, S.S. ; Stephens, D.J. ; Lucovsky, G. ; Hamaker, R.W.
Pub. info.: Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.413-418,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 284
4.

Conference Proceedings
Conference Proceedings
4. HYDROGENATED AMORPHOUS SILICON-NITROGEN, a-Si,N:H ALLOYS: AN ALTERNATIVE TO a-Si,C:H FOR THE WIDE BAND GAP PHOTO-ACTIVE MATERIAL IN TANDEM PV CELLS
Williams, M.J. ; Cho, S.M. ; Lucovsky, G.
Pub. info.: Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A..  pp.759-766,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 297
5.

Conference Proceedings
Conference Proceedings
5. a-Si:H THIN FILM TRANSISTORS AND LOGIC CIRCUITS FABRICATED IN AN INTEGRATED MULTICHAMBER SYSTEM
Kim, S. S. ; Wang, C. ; Parsons, G. N. ; Lucovsky, G.
Pub. info.: Amorphous silicon technology, 1990 : symposium held April 17-20, 1990, San Francisco, California, U.S.A..  pp.373-378,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 192
6.

Conference Proceedings
Conference Proceedings
6. STUDIES OF SiH2Cl2/H2 GAS PHASE CHEMISTRY FOR SELECTIVE THIN FILM GROWTH OF CRYSTALLINE SILICON, c-Si, USING REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION
Theil, J.A. ; Lucovsky, G. ; Hattangady, S.V. ; Fountain, G.G. ; Markunas, R.J.
Pub. info.: Silicon molecular beam epitaxy : symposium held April 29-May 3, 1991, Anaheim, California, U.S.A..  pp.601-612,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 220
7.

Conference Proceedings
Conference Proceedings
7. ELECTRON MICROSCOPY STUDIES OF UNDOPED AND PHOSPHORUS DOPED Si:H AND Si,C:H FILMS
Chen, Y.L. ; Bentley, J. ; Wang, C. ; Lucovsky, G. ; Maher, D.M.
Pub. info.: Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A..  pp.711-716,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 297
8.

Conference Proceedings
Conference Proceedings
8. Si-N BONDING AT THE SiO2/Si INTERFACES DURING DEPOSITION OF SiO2 BY THE REMOTE PECVD PROCESS
Ma, Y. ; Yasuda, T. ; Habermehl, S. ; Lucovsky, G.
Pub. info.: Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A..  pp.341-348,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 236
9.

Conference Proceedings
Conference Proceedings
9. DEPOSITION OF HEAVILY-DOPED μc-SILICON THIN FILMS BY REMOTE PLASMA-ENHANCED CHEMICAL-VAPOR DEPOSITION PROCESS (remote PECVD)
Wang, C: ; Bjorkman, C.H. ; Lee, D.R. ; Williams, M.J. ; Lucovsky, G.
Pub. info.: Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A..  pp.277-282,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 204
10.

Conference Proceedings
Conference Proceedings
10. DEPOSITION OF GaN BY REMOTE PLASMA-ENHANCED CHEMICAL-VAPOR DEPOSITION (Remote PECVD)
Choi, S.W. ; Bachmann, K.J. ; Lucovsky, G.
Pub. info.: Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A..  pp.195-200,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 204
11.

Conference Proceedings
Conference Proceedings
11. A SPECTROSCOPIC INVESTIGATION OF THE AMORPHOUS TO MICROCRYSTALLINE TRANSITION IN SILICON PREPARED BY REACTIVE MAGNETRON SPUTTERING
Turner, W.A. ; Lucovsky, G.
Pub. info.: Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A..  pp.521-526,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 297
12.

Conference Proceedings
Conference Proceedings
12. INTERPRETATION OF NON-LINEAR SHIFTS N XPS/AES FEATURES IN NON-CRYSTALLINE ZIRCONIUM SILUATE ALLOYS
Rayner, U.B., Jr. ; Kang, D. ; Schultz, M. ; Mai, K. ; Lucovsky, G.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.413-428,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
13.

Conference Proceedings
Conference Proceedings
13. Diffusion Of Hydrogen And Deuterium In Stack Systems Of SixNyH2/SixNyDz, And Crystalline Si
Boehme, C. ; Lucovsky, G.
Pub. info.: Amorphous and heterogeneous silicon thin films - 2000 : symposium held April 24-28, 2000, San Francisco, California, U.S.A..  pp.A26.7-,  2001.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 609
14.

Conference Proceedings
Conference Proceedings
14. INTEGRATED PREDEPOSITION CLEANING/PASSIVATION OF Si SURFACES FOR MOS DEVICES WITH Si02/Si INTERFACES
Hattangady, S. ; Misra, V. ; Yasuda, T. ; Xu, X.L. ; Hornung, B. ; Lucovsky, G. ; Wortman, J.J.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.288-295,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
15.

Conference Proceedings
Conference Proceedings
15. THE INTERACTION OF HYDROGEN PLASMAS WITH Ga-BASED Ill-V SEMICONDUCTOR SURFACES
Lu, Z. ; Habermehl, S. ; Lucovsky, G. ; Dietz, N. ; Bachmann, K.J. ; Osgood, R.M.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.416-424,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
16.

Conference Proceedings
Conference Proceedings
16. CHEMICAL REACTION PATHWAYS FOR THE DEPOSITION OF AMORPHOUS SILICON-HYDROGEN ALLOYS BY REMOTE PLASMA ENHANCED CVD
Parsons, G.N. ; Tsu, D.V. ; Lucovsky, G.
Pub. info.: Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.263-268,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 131
17.

Conference Proceedings
Conference Proceedings
17. THE EFFECT OF INTRINSIC IN-PLANE STRESS ON THE LOCAL ATOMIC STRUCTURE OF THEMALLY GROWN SIO2
Fitch, J.T. ; Bjorkman, C.H. ; Sumakeris, J.J. ; Lucovsky, G.
Pub. info.: Thin films : stresses and mechanical properties : symposium held November 28-30, 1988, Boston, Massachusetts, U.S.A..  pp.289-294,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 130
18.

Conference Proceedings
Conference Proceedings
18. Preparation of Ultrathin Oxide Films by Low-Temperature Remote Plasma-Assisted Process
Niimi, H. ; Koh, K. ; Lucovsky, G.
Pub. info.: Proceedings of the eleventh International Symposium on Plasma Processing.  pp.623-630,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-12
19.

Conference Proceedings
Conference Proceedings
19. Controlled Nitrogen Incorporation at Si-SiO2 Interfaces by Re- mote Plasma Assisted Processing
Koh, K. ; Niimi, H. ; Lucovsky, G.
Pub. info.: Proceedings of the eleventh International Symposium on Plasma Processing.  pp.631-638,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-12
20.

Conference Proceedings
Conference Proceedings
20. IMPROVED ELECTRICAL PERFORMANCE OF a-Si:H THIN FILM TRANSISTORS, TFTs WITH n+ μc-Si CONTACT, AND SILICON OXIDE AND NITRIDE DUAL-LAYER DIELECTRICS
He, S.S. ; Stephens, D.J. ; Lucovsky, G.
Pub. info.: Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A..  pp.871-876,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 297
21.

Conference Proceedings
Conference Proceedings
21. Si3N4/SiO2 MULTI-LAYER REFLECTING STACKS FOR PHOTONIC SWITCHING APPLICATIONS
Stephens, D.J. ; He, S.S. ; Lucovsky, G. ; Mikkelsen, H. ; Leo, K. ; Kurz, H.
Pub. info.: Silicon-based optoelectronic materials : Symposium held April 12-14, 1993, San Francisco, California, U.S.A..  pp.223-228,  1993.  Pittsburgh, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 298
22.

Conference Proceedings
Conference Proceedings
22. ESTIMATION OF DEFECT STATE DENSITIES FROM BULK PHOTOELECTRONIC PROPERTIES OF A-SI,Ge:H ALLOYS
Parsons, G. N. ; Lucovsky, G.
Pub. info.: Amorphous silicon semiconductors -- Pure and hydrogenated : symposium held April 21-24, 1987, Anaheim, California, U.S.A..  pp.341-346,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 95
23.

Conference Proceedings
Conference Proceedings
23. STRESS GRADIENTS IN SiO2 THIN FILMS PREPARED BY THERMAL OXIDATION AND SUBJECTED TO RAPID THERMAL ANNEALING
Bjorkman, C. H. ; Fitch, J. T. ; Lucovsky, G.
Pub. info.: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.197-202,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 146
24.

Conference Proceedings
Conference Proceedings
24. SILICON SUBOXIDES: THE "CO-DEPOSITION" OF a-Si:H AND SiO2
Tsu, D.V. ; Lucovsky, G. ; Watkins, M.W.
Pub. info.: Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.289-294,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 131
25.

Conference Proceedings
Conference Proceedings
25. THE EFFECTS OF SURFACE TREATMENT FOR LOW TEMPERATURE SILICON DIOXIDE DEPOSITION ON CADMIUM TELLURIDE
Choi, Seong S. ; Kim, S.S. ; Tsu, D.V. ; Lucovsky, G.
Pub. info.: Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.313-318,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 131
26.

Conference Proceedings
Conference Proceedings
26. RAPID THERMAL ANNEALING OF LOW TEMPERATURE SILICON DIOXIDE FILMS
Fitch, J. T. ; Lucovsky, G.
Pub. info.: Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A..  pp.89-94,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 92
27.

Conference Proceedings
Conference Proceedings
27. FORMATION OF MULTILAYER SiO2-SiOx HETEROSTRUCTURES BY CONTROL OF REACTION PATHWAYS IN REMOTE PECVD
Tsu, D.V. ; Kim, S.S. ; Theil, J.A. ; Wang, Cheng ; Lucovsky, G.
Pub. info.: Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A..  pp.209-214,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 165
28.

Conference Proceedings
Conference Proceedings
28. CONTRIBUTIONS TO SILICON-HYDROGEN BOND-STRETCHING FREQUENCY IN AMORPHOUS Si ALLOYS
Jing, Z. ; Whitten, J.L. ; Lucovsky, G.
Pub. info.: Amorphous silicon technology, 1992.  pp.287-292,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 258
29.

Conference Proceedings
Conference Proceedings
29. DEFECT STATES AND STRUCTURAL DISORDER IN a-Si
Davidson, B. N. ; Lucovsky, G. ; Bernholc, J.
Pub. info.: Amorphous silicon technology, 1992.  pp.263-268,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 258
30.

Conference Proceedings
Conference Proceedings
30. RAMAN SCATTERING FROM MICROCRYSTALLINE FILMS: CONSIDERATIONS OF COMPOSITE STRUCTURES WITH DIFFERENT OPTICAL ABSORPTION PROPERTIES
Nemanich, R.J. ; Buehler, E.C. ; LeGrice, Y.M. ; Shroder, R.E. ; Parsons, G.N. ; Wang, C. ; Lucovsky, G. ; Boyce, J.B.
Pub. info.: Materials issues in microcrystalline semiconductors : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.265-270,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 164
31.

Conference Proceedings
Conference Proceedings
31. DEPOSITION OF AMORPHOUS AND MICROCRYSTALLINE Si,C ALLOY THIN FILMS BY A REMOTE PLASMA-ENHANCED CHEMICAL-VAPOR DEPOSITION PROCESS
Wang, C. ; Lucovsky, G. ; Nemanich, R.J.
Pub. info.: Amorphous silicon technology 1991 : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.751-756,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 219
32.

Conference Proceedings
Conference Proceedings
32. STRAIN DEPENDENT DIFFUSION IN THE DRY THERMAL OXIDATION PROCESS OF CRYSTALLINE Si
Bjorkman, C. H. ; Lucovsky, G.
Pub. info.: Thin films : stresses and mechanical properties III : symposium held December 2-5, 1991, Boston, Massachusetts, U.S.A..  pp.81-86,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 239
33.

Conference Proceedings
Conference Proceedings
33. THE GROWTH OF SILICON OXIDE FILMS BY REMOTE PLASMA ENHANCED CVD
Tsu, D.V. ; Lucovsky, G.
Pub. info.: Interfaces, superlattices, and thin films : symposium held December 1-6, 1986, Boston, Massachusetts, U.S.A..  pp.595-602,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 77
34.

Conference Proceedings
Conference Proceedings
34. CHEMICALLY MODIFIED SECOND HARMONIC GENERATION AT SURFACES ON VICINAL Si(111) WAFERS
Emmerichs, U. ; Meyer, C. ; Leo, K. ; Kurz, H. ; Bjorkman, C.H. ; Shearon, Jr., C.E. ; Ma, Y. ; Yasuda, T. ; Lucovsky, G.
Pub. info.: Semiconductor heterostructures for photonic and electronic applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.815-820,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 281
35.

Conference Proceedings
Conference Proceedings
35. THE EFFECTS OF SURFACE AND INTERFACE DEPLETION REGIONS ON THE PHOTOCONDUCTIVITY OF a-Si:H IN SURFACE CELL STRUCTURES
Parson, G.N. ; Kusano, C. ; Lucovsky, G.
Pub. info.: Interfaces, superlattices, and thin films : symposium held December 1-6, 1986, Boston, Massachusetts, U.S.A..  pp.589-594,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 77
36.

Conference Proceedings
Conference Proceedings
36. THE OPTICAL PROPERTIES OF PLASMA-DEPOSITED SiO2 AND Si3N4 BRAGG REFLECTORS IN THE SPECTRAL RANGE FROM 1.8 TO 3.0 eV
Stephens, D.J. ; He, S.S. ; Lucovsky, G. ; Mikkelsen, H. ; Leo, K. ; Kurz, H.
Pub. info.: Semiconductor heterostructures for photonic and electronic applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.809-814,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 281
37.

Conference Proceedings
Conference Proceedings
37. FORMATION OF DIVICE QUALITY Si/SiO2 INTERFACES IN A MULTICHAMBER INTEGRATED PROCESSING SYSTEM
Kim, S. S. ; Tsu, D. V. ; Lucovsky, G. ; Fountain., G. G. ; Markunas, R. J
Pub. info.: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.327-332,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 146
38.

Conference Proceedings
Conference Proceedings
38. Si(100) SURFACE PREPARATION BY IN-SITU OR IN-VACUO EXPOSURE TO REMOTELY PLASMA-GENERATED ATOMIC HYDROGEN: APPLICATIONS TO DEPOSITED SiO2 AND EPITAXIAL GROWTH OF Si
Yasuda, T. ; Ma, Y. ; Habermehl, S. ; Kim, S.S. ; Lucovsky, G. ; Schneider, T.P. ; Cho, J. ; Nemanich R.J.
Pub. info.: Evolution of thin-film and surface microstructure : symposium held November 26-December 1, 1990, Boston, Massachusetts, U.S.A..  pp.395-400,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 202
39.

Conference Proceedings
Conference Proceedings
39. BONDED HYDROGEN IN SILICON OXIDE THIN FILMS DEPOSITED BY REMOT PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION
Tsu, D. V. ; Lucovsky, G.
Pub. info.: Plasma processing and synthesis of materials : symposium held April 21-23, 1987, Anaheim, California, U.S.A..  pp.285-290,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 98
40.

Conference Proceedings
Conference Proceedings
40. COMPARISON OF TRAPPING STATES AT SiQ2/473Si INTERFACES ON Si(100), (110), AND (111) PREPARED BY PLASMA-ASSISTED OXIDATION AND OXIDE DEPOSITION, AND BY EXPOSURE TO ATOMIC H PRIOR TO OXIDATION AND DEPOSITION
Yasuda, T. ; Ma, Y. ; Habermechl, S. ; Lucovsky, G.
Pub. info.: Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A..  pp.473-480,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 262
41.

Conference Proceedings
Conference Proceedings
41. BARRIER LIMITED TRANSPORT MECHANISMS IN DOPED μc-Si AND μc-Si, C
Lucovsky, G. ; Wang, C.
Pub. info.: Amorphous silicon technology 1991 : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.377-382,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 219
42.

Conference Proceedings
Conference Proceedings
42. STUDIES OF MOS HETEROJUNCTION DEVICES USING DOPED μc-Si AND a-Si
Lee, D.R. ; Bjorkman, C.H. ; Wang, C. ; Lucovsky, G.
Pub. info.: Amorphous silicon technology 1991 : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.395-400,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 219
43.

Conference Proceedings
Conference Proceedings
43. DEPOSITION AND CHARACTERIZATION OF NEAR ‘INTRINSIC” μc-Si FILMS DEPOSITED BY REMOTE PLASMA-ENHANCED CHEMICAL-VAPOR DEPOSITION -RPECVD
Williams, M.J. ; Wang, C. ; Lucovsky, G.
Pub. info.: Amorphous silicon technology 1991 : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.388-394,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 219
44.

Conference Proceedings
Conference Proceedings
44. LOCAL BONDING IN a-Si,Ge ALLOY FILMS
Lucovsky, G. ; Rudder, R.A. ; Cook, Jr., J.W. ; Lin, S.Y.
Pub. info.: Materials issues in applications of amorphous silicon technology : symposium held April 15-17, 1985, San Francisco, California, U.S.A..  pp.135-144,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 49
45.

Conference Proceedings
Conference Proceedings
45. *TRANSPORT AND MICROSTRUCTURE OF MICROCRYSTALLINE SILICON ALLOYS
Lucovsky, G. ; Wang, C. ; Williams, M.J. ; Chen, Y.L. ; Maher, D.M.
Pub. info.: Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.443-454,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 283
46.

Conference Proceedings
Conference Proceedings
46. PHOTOLUMINESCENCE IN B-DOPED μc-Si:H
Gu, S.Q. ; Viner, J.M. ; Taylor, P.C. ; Williams, M.J. ; Turner, W.A. ; Lucovsky, G.
Pub. info.: Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.579-584,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 283
47.

Conference Proceedings
Conference Proceedings
47. ELECTRICAL PROPERTIES OF BORON-DOPED μc-Si:H PREPARED BY REACTIVE MAGNETRON SPUTTERING FROM c-Si TARGETS
Turner, W.A. ; Williams, M.J. ; Chen, Y.L. ; Maher, D.M. ; Lucovsky, G.
Pub. info.: Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.567-572,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 283
48.

Conference Proceedings
Conference Proceedings
48. CONTROL OF PROCESS-INDUCED DEFECTS IN THE FORMATION OF SINGLE AND MULTIPLE LAYER DIELECTRIC STRUCTURES FOR Si SEMICONDUCTOR DEVICES
He, S. S. ; Stephens, D. J. ; Ma. Y. ; Yasuda, T. ; Habermehl, S. ; Lucovsky, G.
Pub. info.: Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A..  pp.653-658,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 262
49.

Conference Proceedings
Conference Proceedings
49. BOND ANGLE DISORDER IN TETRAHEDRALLY BONDED AMORPHOUS SILICON
Wong, C.K. ; Lucovsky, G.
Pub. info.: Materials issues in amorphous-semiconductor technology : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.77-82,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 70
50.

Conference Proceedings
Conference Proceedings
50. ELECTRONIC STRUCTUR OF DIVALENT DEFECTS IN TETRAHEDRALLY BONDED AMORPHOUS MATERIALS
Lin, S.Y. ; Lucovsky, G. ; Guha, S. ; Payson, J.S.
Pub. info.: Materials issues in amorphous-semiconductor technology : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.107-112,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 70