1.

Conference Proceedings
Conference Proceedings
1. Cleaning force in laser cleaning of silicon substrates
Song,W.D. ; Lu,Y.F. ; Ye,K.D. ; Tee,C.K. ; Hong,M.H. ; Liu,D.M. ; Low,T.S.
Pub. info.: Microelectronic Packaging and Laser Processing.  pp.158-165,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3184
2.

Conference Proceedings
Conference Proceedings
2. Excimer laser irradiation on NiP surface
Liu,D.M. ; Lu,Y.F. ; Yiang,K.Y. ; Song,W.D. ; Hong,M.H. ; Low,T.S.
Pub. info.: Microelectronic Packaging and Laser Processing.  pp.166-174,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3184
3.

Conference Proceedings
Conference Proceedings
3. Audible acoustic wave real-time monitoring in laser processing of microelectronic materials
Hong,M.H. ; Lu,Y.F. ; Song,W.D. ; Liu,D.M. ; Low,T.S.
Pub. info.: Microelectronic Packaging and Laser Processing.  pp.148-157,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3184