1.

Conference Proceedings
Conference Proceedings
1. Gettering technologies in advanced low temperature process
Sano, M. ; Ohgushi, S. ; Sadamitsu, S. ; Tsuya, H.
Pub. info.: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II.  pp.281-294,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-22
2.

Conference Proceedings
Conference Proceedings
2. REDUCTION OF GROWN-IN DEFECTS BY HIGH TEMPERATURE ANNEALING
Adachi, N. ; Hisatomi, T. ; Sano, M. ; Tsuya, H.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.698-706,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(1)
3.

Conference Proceedings
Conference Proceedings
3. OXYGEN PRECIPITATION BEHAVIOR IN SILICON DURING CZOCHRALSKI CRYSTAL GROWTH
Hourai, M. ; Nagashima, T. ; Kajita, E. ; Miki, S. ; Sumita, S. ; Sano, M. ; Shigematsu, T.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.156-167,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
4.

Conference Proceedings
Conference Proceedings
4. GETTERING TECHNIQUES OF HEAVY METAL IMPURITIES IN SILICON
Sano, M. ; Sumita, S. ; Shigematsu, T. ; Fujino, N.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.784-795,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
5.

Conference Proceedings
Conference Proceedings
5. RADIAL DISTRIBUTION OF THERMALLY-INDUCED DEFECTS IN HEAVILY BORON-DOPED SILICON WAFERS
Asayama, E. ; Ono, T. ; Takeshita, M. ; Hourai, M. ; Sano, M. ; Tsuya, H.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.546-556,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(1)
6.

Conference Proceedings
Conference Proceedings
6. AFM OBSERVATION OF Si (100) SURFACE AFTER HYDROGEN ANNEALING AND WET CHEMICAL PROCESSING
Yanase, Y. ; Horie, H. ; Oka, Y. ; Sano, M. ; Sumita, S. ; Shigematsu, T.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.546-553,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
7.

Conference Proceedings
Conference Proceedings
7. Intrinsic Gettering of Nickel and Copper for Advanced Low-Temperature Device Processes
Ogushi, S. ; Reilly, N. ; Sadamitsu, S. ; Koike, Y. ; Sano, M.
Pub. info.: Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.227-,  1998.  Warrendale, Pa.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 510
8.

Conference Proceedings
Conference Proceedings
8. Formation of mesoscopic polymer dots by rubbing transfer
Sano, M. ; Okamura, J. ; Shinkai, S.
Pub. info.: Organic/inorganic hybrid materials II : symposium held April 5-9, 1999, San Francisco, California, U.S.A..  pp.155-,  1999.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 576
9.

Conference Proceedings
Conference Proceedings
9. Investigation of the Effect of Thermal History on Ring-OSF Formation in CZ-Silicon Crystals
Kelly, G. P. ; Hourai, M. ; Umeno, S. ; Sano, M. ; Tsuya, H.
Pub. info.: Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.21-,  1998.  Warrendale, Pa.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 510
10.

Conference Proceedings
Conference Proceedings
10. Synthesis of [Ca2(Co1-xCux)2O4]yCoO2 Single Crystals and Their Intrinsic Properties
Suzuki, M. ; Horii, S. ; Sano, M. ; Fujie, K. ; Otzschi, K. ; Shimoyama, J. ; Kishio, K.
Pub. info.: Solid-State Chemistry of Inorganic Materials IV : symposium held December 2-6, 2002, Boston, Massachusetts, U.S.A..  pp.375-380,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 755
11.

Conference Proceedings
Conference Proceedings
11. Enhanced Thermoelectric Properties of [Ca2CoO3-δ]0.62CoO2 Polycrystalline Bulk by Control of Microstructure and Oxygen Content
Sano, M. ; Horii, S. ; Matsubara, I. ; Funahashi, R. ; Shikano, M. ; Otzschi, K. ; Shimoyama, J. ; Kishio, K.
Pub. info.: Solid-State Chemistry of Inorganic Materials IV : symposium held December 2-6, 2002, Boston, Massachusetts, U.S.A..  pp.369-374,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 755
12.

Conference Proceedings
Conference Proceedings
12. INFLUENCE OF GROWN - IN DEFECTS IN CZ CRYSTAL ON GATE OXIDE INTEGRITY
Sano, M. ; Hourai, M. ; Sumita, S. ; Shigematsu, T.
Pub. info.: Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing.  pp.3-15,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-15
13.

Conference Proceedings
Conference Proceedings
13. Thermoelectric Properties of Magnetically c-axis Aligned Polycrystals in (Ca2ComOm+2-δ)-0.62CoO2 (m=1 and 2) Systems
Horii, S. ; Matsubara, I. ; Sano, M. ; Funahashi, R. ; Shikano, M. ; Shimoyama, J. ; Kishio, K.
Pub. info.: Solid-State Chemistry of Inorganic Materials IV : symposium held December 2-6, 2002, Boston, Massachusetts, U.S.A..  pp.451-458,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 755
14.

Conference Proceedings
Conference Proceedings
14. Formation of Positronium in Cup-Stacked Carbon Nanofibers
Murakami, H. ; Hiejima, T. ; Sano, M.
Pub. info.: Positron annihilation ICPA-13 : proceedings of the 13th International Conference on Positron Annihilation, Kyoto, Japan, September 2003.  pp.331-333,  2004.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 445-446
15.

Conference Proceedings
Conference Proceedings
15. Formation of Vacancies in Layered MPS3 (M=Fe, Mn, Zn) upon Intercalation
Murakami, H. ; Tsutsumi, Y. ; Marutani, D. ; Sano, M. ; Ichimura, K.
Pub. info.: Positron annihilation, ICPA-12 : Proceedings of the 12th International Conference on Positron Annihilation, August 6-12, 2000, München, Germany.  pp.380-382,  2001.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 363-365
16.

Conference Proceedings
Conference Proceedings
16. Control of grown-in defects in nitrogen-doped CZ silicon crystal for new generation devices
Hourai, M. ; Ono, T. ; Umeno, S. ; Tanaka, T. ; Asayaoia, E. ; Nishikawa, H. ; Sano, M. ; Tsuya, H.
Pub. info.: Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany.  pp.19-34,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-29
17.

Conference Proceedings
Conference Proceedings
17. Search for the Positronium Quadrupole Interaction in Molecular Crystals
Suzuki, N. ; Saito, H. ; Nagai, Y. ; Hyodo, T. ; Murakami, H. ; Sano, M. ; Bondarev, I.V. ; Kuten, S.A.
Pub. info.: Positron annihilation ICPA-13 : proceedings of the 13th International Conference on Positron Annihilation, Kyoto, Japan, September 2003.  pp.410-412,  2004.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 445-446
18.

Conference Proceedings
Conference Proceedings
18. Acoustic Fatigue Strength of Fiber-Reinforced Plastic Panels
Fujii, T. ; Fukuda, T. ; Iida, S. ; Sano, M.
Pub. info.: Resins for aerospace : based on a symposium sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the ACS/CSJ Chemical Congress (177th ACS National Meeting), Honolulu, Hawaii, April 3-6, 1979.  pp.305-,  1980.  Washington, D.C..  American Chemical Society
Title of ser.: ACS symposium series
Ser. no.: 132
19.

Conference Proceedings
Conference Proceedings
19. Tea catechin (EGCG) and its metabolites as bioantioxidants
Tomita, I. ; Sano, M. ; Sasaki, K. ; Miyase, T.
Pub. info.: Fruits, vegetables, and teas.  pp.209-216,  1998.  Washington, DC.  American Chemical Society
Title of ser.: ACS symposium series
Ser. no.: 701
20.

Conference Proceedings
Conference Proceedings
20. Defects Behavior on p/p+ Epitaxial Wafers During Low Temperature Device Processing
Hourai, M. ; Asayama, E. ; Onno, T. ; Sano, M. ; Tsuya, H.
Pub. info.: Proceedings of the Fourth International Symposium on High Purity Silicon.  pp.214-225,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-13
21.

Conference Proceedings
Conference Proceedings
21. GaN-based laser diodes emitting from ultraviolet to blue-green (Invited Paper)
Nagahama, S. ; Sano, M. ; Yanamoto, T. ; Morita, D. ; Miki, O. ; Sakamoto, K. ; Yamamoto, M. ; Matsuyama, Y. ; Kawata, Y. ; Murayama, T. ; Mukai, T.
Pub. info.: Novel In-Plane Semiconductor Lasers II.  pp.108-116,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4995
22.

Conference Proceedings
Conference Proceedings
22. 365-nm ultraviolet-light-emitting diodes with an output power of over 400 mW
Morita, D. ; Sano, M. ; Yamamoto, M. ; Matoba, K. ; Yasutomo, K. ; Akaishi, K. ; Kasai, Y. ; Nagahama, S. ; Mukai, T.
Pub. info.: Quantum Sensing and Nanophotonic Devices.  pp.415-421,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5359
23.

Conference Proceedings
Conference Proceedings
23. Performance improvements of MOEMS-based diffractive arrays: address isolation and optical switching
Panaman, G. ; Madison, S. ; Sano, M. ; Castracane, J.
Pub. info.: MOEMS and Miniaturized Systems V.  pp.54-63,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5719