Hashiura, Y. ; Ikehara, T. ; Kitajima, A. ; Goto, H. ; Maeda, R.
Pub. info.:
Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia. pp.414-421, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Murakoshi, Y. ; Hanada, K. ; Li, Y. ; Uchino, K. ; Suzuki, T. ; Maeda, R.
Pub. info.:
Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia. pp.473-480, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Takagi, H. ; Maeda, R. ; Hosoda, N. ; Chung, T.R. ; Suga, T.
Pub. info.:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.265-274, 1999. Pennington, N.J.. Electrochemical Society
BioMEMS and nanotechnology : 10-12 December 2003, Perth, Australia. pp.231-238, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Shan, X.C. ; Murakoshi, Y. ; Wang, Z. ; Lu, H.J. ; Jin, Y. ; Ikehara, T. ; Maeda, R. ; Wong, C.K.
Pub. info.:
Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia. pp.428-433, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ichiki, M. ; Kobayashi, T. ; Morikawa, Y. ; Mabune, Y. ; Nakada, T. ; Nonaka, K. ; Endo, C. ; Maeda, R.
Pub. info.:
Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia. pp.400-407, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia. pp.414-421, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.393-400, 1997. Pennington, NJ. Electrochemical Society
Lee, C. ; Itoh, T. ; Chu, J. ; Ohashi, T. ; Maeda, R. ; Schroth, A. ; Suga, T.
Pub. info.:
Materials for smart systems II : sympsoium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.35-, 1997. Pittsburgh, PA. MRS - Materials Research Society
Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts,U.S.A.. pp.233-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Smart materials II : 16-18 December 2002, Melbourne, Australia. pp.30-37, 2002. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Smart materials III : 13-15 December 2004, Sydney, Australia. pp.89-96, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Smart materials II : 16-18 December 2002, Melbourne, Australia. pp.356-363, 2002. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Choi, H. ; Ryew, S. ; Jung, K. ; Jeon, J.W. ; Kim, H. ; Nam, J.-D. ; Takanishi, A. ; Maeda, R. ; Kaneko, K. ; Tanie, K.
Pub. info.:
Smart structures and materials 2002 : electroactive polymer actuators and devices (EAPAD) : 18-21 March 2002, San Diego, USA. pp.138-149, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Loh, N.H. ; Tor, S.B. ; Tay, B.Y. ; Murakoshi, Y. ; Maeda, R.
Pub. info.:
THERMEC '2003 : International Conference on Processing & Manufacturing of Advanced Materials, July 7-11, 2003, Leganés, Madrid, Spain. pp.4289-4294, 2003. Zuerich-Uetikon, Switzerland. Trans Tech Publications
Kobayashi, T. ; Tsaur, J. ; Ichiki, M. ; Maeda, R.
Pub. info.:
Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia. pp.524-531, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Murakoshi, Y. ; Shan, X.-C. ; Sano, T. ; Takahashi, M. ; Maeda, R.
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Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia. pp.532-539, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ezoe, Y. ; Koshiishi, M. ; Mita, M. ; Mitsuda, K. ; Ishisaki, T. ; Hoshino, A. ; Yang, Z. ; Takano, T. ; Mekaru, H. ; Maeda, R.
Pub. info.:
Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray. pp.62661B-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems. pp.67-75, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Tsaur, J.-J. ; Wang, Z.J. ; Zhang, L. ; Ichiki, M. ; Maeda, R. ; Suga, T.
Pub. info.:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems. pp.215-224, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems. pp.98-104, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems. pp.365-372, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Shan, X.C. ; Maeda, R. ; Ikehara, T. ; Mekaru, H. ; Hattori, T.
Pub. info.:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems. pp.356-364, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Chu, J. ; Lu, J. ; Wu, Y. ; Huang, W. ; Maeda, R. ; Itoh, T. ; Suga, T.
Pub. info.:
Micromachining and Microfabrication Process Technology and Devices. pp.379-383, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Shan, X. C. ; Jin, Y. F. ; Wang, Z. F. ; Wang, C. K. ; Murakoshi, Y. ; Maeda, R.
Pub. info.:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II. pp.337-344, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering