Venables, D. ; Krishnamoorthy, V. ; Gossmann, H-J. ; Lilak, A. ; Jones, K. S. ; Jacobson, D. C.
Pub. info.:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.315-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Herner, S. B. ; Krishnamoorthy, V. ; Jones, K. S. ; Mogi, T. K. ; Gossmann, H-J.
Pub. info.:
Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.157-, 1997. Pittsburgh, Penn. MRS - Materials Research Society