1.

Conference Proceedings
Conference Proceedings
1. Infusion Processing: An Alternative to Plasma Technology for Semiconductor Device Manufacturing (Invited paper)
Hautala, J. ; Skinner, W. ; Sherman, S. ; Shao, Y. ; Borland, J.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.118-132,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-06
2.

Conference Proceedings
Conference Proceedings
2. High Deposition Rate a-Si:H for the Flat-Panel Display Industry
Hautala, J. ; Saleh, Z. ; Westendorp, J. F. M. ; Meiling, H. ; Sherman, S. ; Wagner, S.
Pub. info.: Amorphous silicon technology, 1996 : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.83-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 420
3.

Conference Proceedings
Conference Proceedings
3. High Deposition Rate a-Si:H for the Flat Panel Display Industry
Hautala, J. ; Saleh, Z. ; Westendorp, J. F. M. ; Meiling, H. ; Sherman, S. ; Wagner, S.
Pub. info.: Flat panel display materials II : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.9-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 424