1.

Conference Proceedings
Conference Proceedings
1. CO2 laser annealing with NiTi thin films deposited by sputtering
He, Q. ; Huang, W. ; Hong, M. ; Chong, T.C. ; Fu, Y. ; Du, H.
Pub. info.: Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany.  pp.319-322,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5063
2.

Conference Proceedings
Conference Proceedings
2. Mechanical Properties of Sputtered TiNiCu Shape Memory Alloy Thin Films
Fu, Y. ; Du, H. ; Gao, S. ; Yi, S.
Pub. info.: Advanced materials processing II : proceedings of the 2nd International Conference on Advanced Materials Processing, Grand Hyatt, Singapore, 2nd-4th December 2002.  pp.37-40,  2003.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 437-438
3.

Conference Proceedings
Conference Proceedings
3. Fabrication of micromachined TiNi-based microgripper with complaint structure
Fu, Y. ; Du, H.
Pub. info.: Smart Sensors, Actuators, and MEMS.  1  pp.38-47,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5116
4.

Conference Proceedings
Conference Proceedings
4. Dynamic testing of micro devices using PZT base excitation [5852-101]
Hu, M. ; Xie, J. ; Ling, S.-F. ; Du, H. ; Fu, Y.
Pub. info.: Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics.  pp.633-638,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5852
5.

Conference Proceedings
Conference Proceedings
5. Characterization and MEMS application of sputtered TiNi shape memory alloy thin films
Du, H. ; Fu, Y.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.138-146,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
6.

Conference Proceedings
Conference Proceedings
6. Fabrication of PZT microdevices using a high-yield sol-gel process
Hu, M. ; Du, H. ; Xie, J. ; Ling, S.-F. ; Fu, Y.
Pub. info.: Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II.  pp.180-188,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5650