1.

Conference Proceedings
Conference Proceedings
1. Dynamic imaging of interaction between protein 14-3-3 and Bid in living cells [6087-19]
Chen, T. ; Xing, D. ; Wang, J.
Pub. info.: Biophotonics and immune responses : 23-24 January 2006, San Jose, California, USA.  pp.60870L-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6087
2.

Conference Proceedings
Conference Proceedings
2. Friction compensation with repeat control at low speed for an optoelectronic system
Chen, J. ; Guo, J. ; Chen, T. ; Bai, W.F.
Pub. info.: Optomechatronic systems III : 12-14 November 2002, Stuttgart, Germany.  pp.528-533,  2002.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4902
3.

Conference Proceedings
Conference Proceedings
3. The importance of nonstoichiometric oxygen in NiO for the catalytic oxidative dehydrogenation of ethane
Chen, T. ; Li, W. ; Yu, C. ; Jin, R. ; Xu, H.
Pub. info.: 12th International Congress on Catalysis : proceedings of the 12th ICC, Granada, Spain, July 9-14, 2000.  pp.1847-,  2000.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 130
4.

Conference Proceedings
Conference Proceedings
4. Bone tissue ultrastructural defects in a mouse model for osteogenesis imperfecta: a Raman spectroscopy study
Chen, T. ; Kozloff, K.M. ; Goldstein, S.A. ; Morris, M.D.
Pub. info.: Biomedical vibrational spectroscopy and biohazard detection technologies : 25-27 January, 2004, San Jose, California, USA.  pp.85-92,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5321
5.

Conference Proceedings
Conference Proceedings
5. Wafer level optoelectronic device packaging using MEMS (Invited Paper)
Nallani, A. ; Chen, T. ; Lee, J.-B. ; Hayes, D. ; Wallace, D.
Pub. info.: Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain.  pp.116-127,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5836
6.

Conference Proceedings
Conference Proceedings
6. Investigating a lithography strategy for diagonal routing architecture at sub-100nm technology nodes
Li, S. ; Chen, T. ; Shah, S. ; Joshi, K. ; Thumaty, K. ; Arora, N.
Pub. info.: Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA.  pp.368-377,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5756
7.

Conference Proceedings
Conference Proceedings
7. Lithography yield check for IC design
Cai, L. ; Chen, T.
Pub. info.: Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA.  pp.285-293,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5756
8.

Conference Proceedings
Conference Proceedings
8. Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design
Chen, T. ; Felix, D. ; Park, S. -K. ; Hauser, P. ; McCarthy, B. ; Sarid, D. ; Poweleit, C. ; Menendez, J. ; Milster, T. D.
Pub. info.: Optical data storage 2004 : 18-21 April 2004, Monterey, California, USA.  pp.634-641,  2004.  Bellingham.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5380
9.

Conference Proceedings
Conference Proceedings
9. Short-length high-gain ASE fiber laser at 1.54-μm by high-codoped erbium and ytterbium phosphate laser glasses
Wu, R. ; Myers, J.D. ; Chen, T. ; Myers, M.J. ; Hardy, C.R. ; Driver, J.K.
Pub. info.: Fiber lasers: technology, systems, and applications : 26-28 January, 2004, San Jose, California, USA.  pp.64-72,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5335
10.

Conference Proceedings
Conference Proceedings
10. Electric-Pulse-Induced Reversible Resistance Change Effect and Its Fatigue Behavior in Manganite Perovskite Films
Wnag, Q. ; Dong, R. ; Chen, L. ; Chen, T. ; Li, X.
Pub. info.: PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China.  pp.3799-3802,  2005.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 475-479(5)
11.

Conference Proceedings
Conference Proceedings
11. Fabrication of biodegradable polymer (PLGA) microstructures and applications in controlled drug delivery
Yang, R. ; Chen, T. ; Chen, H. ; Wang, W.
Pub. info.: Microfluidics, bioMEMS, and medical microsystems II : 26-27 January 2004, San Jose, California, USA.  pp.130-137,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5345
12.

Conference Proceedings
Conference Proceedings
12. Modeling of collection efficiency in lidar spectroscopy [5887-33]
Lienert, B. ; Sharma, S. K. ; Chen, T. ; Price, F. ; Madey, J. M.
Pub. info.: Lidar remote sensing for industry and environmental monitoring VI : 2-3 August 2005, San Diego, California, USA.  pp.58870V-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5887
13.

Conference Proceedings
Conference Proceedings
13. MODELLING OF THE INTRAMOLECULAR STRUCTURE OF MONOLAYER C60 MOLECULES OBSERVED WITH SCANNING TUNNELING MICROSCOPY
Chen, T. ; Howells, S. ; Gallagher, H. ; Yi, L. ; Sarid, D. ; Lichtenberger, D.L. ; Nebesny, K.W. ; Ray, C.D.
Pub. info.: Clusters and cluster-assembled materials : symposium held November 26-30, 1990, Boston, Massachusetts, U.S.A..  pp.721-726,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 206
14.

Conference Proceedings
Conference Proceedings
14. Near-field induced polarization imaging for optical data storage metrology [6282-13]
Chen, T. ; Milster, D. T.
Pub. info.: Optical Data Storage 2006 : 23-26 April 2006, Montreal, Canada.  pp.62820D-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6282
15.

Conference Proceedings
Conference Proceedings
15. Target acquisition and tracking based on a priori knowledge and an image sensor
Fang, Z. H. ; Chen, T.
Pub. info.: Acquisition, tracking, and pointing XVI : 3-4 April 2002, Orlando, USA.  pp.208-216,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4714
16.

Conference Proceedings
Conference Proceedings
16. Corrosion Protection of Metals by Conductive Polymers III: Improved Performance and Inhibition in NaCl
Lu, Wei-Kang ; Elsenbaumer, Ronald L. ; Chen, T. ; Kulkarni, V. G.
Pub. info.: Electrical, optical, and magnetic properties of organic solid-state materials IV : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A..  pp.653-,  1998.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 488
17.

Conference Proceedings
Conference Proceedings
17. The Effects of Nanostructure on the Strengthening of NiAl
Chen, T. ; Thadhani, N. N. ; Hampikian, J. M.
Pub. info.: High-Temperature ordered intermetallic alloys VIII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A..  pp.KK8.3.1-,  1999.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 552
18.

Conference Proceedings
Conference Proceedings
18. Photonic Bandgap Formation by Wafer Bonding and Delamination
Wada, K. ; Chen, T. ; Michel, J. ; Kimerling, L. C. ; Aga, H. ; Mitani, K. ; Abe, T. ; Suezawa, M.
Pub. info.: III-V and IV-IV materials and processing challenges for highly integrated microelectronics and optoelectronics : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A..  pp.121-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 535
19.

Conference Proceedings
Conference Proceedings
19. Nanocomposite Particles for the Preparation of Advanced Nanomaterials
Somasundaran, P. ; Chen, T.
Pub. info.: Surface-controlled nanoscale materials for high-added-value applications : symposium held November 30-December 3, 1997, Boston, Massachusetts, U.S.A..  pp.161-,  1998.  Warrendale, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 501
20.

Conference Proceedings
Conference Proceedings
20. Synthesis and Characterization of Nanosized NiAl Particles
Chen, T. ; Hampikian, J. M.
Pub. info.: Nanostructured powders and their industrial applications : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.205-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 520
21.

Conference Proceedings
Conference Proceedings
21. Method for improving the low-speed performance of an optoelectronic tracking system
Han, X. ; Chen, T. ; Chen, J.
Pub. info.: Fifth International Symposium on Instrumentation and Control Technology : 24-27 October 2003, Beijing, China.  pp.489-492,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5253
22.

Conference Proceedings
Conference Proceedings
22. Next-generation optoelectronic components enabled by direct-write microprinting technology
Hayes, D.J. ; Chen, T.
Pub. info.: Enabling photonic technologies for aerospace applications VI : 14-15 April, 2004, Orlando, Florida, USA.  pp.83-90,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5435
23.

Conference Proceedings
Conference Proceedings
23. Opportune acquisition and tracking time for the fast-moving targets in a ground-based telescope
Chen, J. ; Wang, J. ; Chen, T.
Pub. info.: Ground-based telescopes : 21-25 June 2004, Glasgow, Scotland, United Kingdom.  pp.1203-1209,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5489
24.

Conference Proceedings
Conference Proceedings
24. The fabrication model of Fresnel diffractive lens with transverse-adding technique
Chen, M. ; Yu, S. ; Gao, Y. ; Yu, D. ; Qi, X. ; Chen, T.
Pub. info.: Holography, diffractive optics, and applications II : 8-11 November 2004, Beijing, China.  pp.483-490,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5636
25.

Conference Proceedings
Conference Proceedings
25. Analysis of tracking performance for altitude-azimuth pedestal near the zenith
Ji, T. ; Yang, X. ; Chen, J. ; Chen, T.
Pub. info.: Fifth International Symposium on Instrumentation and Control Technology : 24-27 October 2003, Beijing, China.  pp.398-401,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5253
26.

Conference Proceedings
Conference Proceedings
26. Architectures and application of data fusion system based on nervous system evolution
Fang, Z.H. ; Chen, T. ; Zhai, B.C. ; Zhao, Y. ; Tan, Z.J.
Pub. info.: Applications and science of neural networks, fozzy systems, and evolutionary computation V : 9-10 July 2002, Seattle, Washington, USA.  pp.236-243,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4787
27.

Conference Proceedings
Conference Proceedings
27. Effects of cadmium combined with ultraviolet-B radiation on growth, gas exchange, and stable carbon isotope value (δ13C) in soybean (Glycine max L.)
Chen, T. ; Qiang, W. ; An, L. ; Wang, X.
Pub. info.: Ultravaiolet ground-and space-based measurements, models, and effects II :25 October 2002, Hangzhou, China.  pp.210-218,  2003.  Bellingham, Wash.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4896
28.

Conference Proceedings
Conference Proceedings
28. Effects of enhanced UV-B radiation on growth, stomata, flavonoid, and ABA content in cucumber leaves
An, L. ; Wang, J. ; Liu, Y. ; Chen, T. ; Xu, S. ; Feng, H. ; Wang, X.
Pub. info.: Ultravaiolet ground-and space-based measurements, models, and effects II :25 October 2002, Hangzhou, China.  pp.223-231,  2003.  Bellingham, Wash.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4896
29.

Conference Proceedings
Conference Proceedings
29. Research of intelligent control method for the temperature of fermentation
Feng, D. ; Fei, M. ; Chen, T. ; Dong, L.
Pub. info.: Fifth International Symposium on Instrumentation and Control Technology : 24-27 October 2003, Beijing, China.  pp.792-796,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5253
30.

Conference Proceedings
Conference Proceedings
30. In vivo depth-resolved birefringence measurements of the human retinal nerve fiber layer using polarization-sensitive optical coherence tomography
Cense, B. ; Chen, T. ; Park, B.H. ; Pierce, M.C. ; de Boer, J.F.
Pub. info.: Coherence domain optical methods and optical coherence tomography in biomedicine VII : 27-29 January 2003, San Jose, California, USA.  pp.73-77,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4956
31.

Conference Proceedings
Conference Proceedings
31. Optimal scheduling of capture times in a multiple-capture imaging system
Chen, T. ; El Gamal, A.
Pub. info.: Sensors and camera systems for scientific, industrial, and digital photography applications III : 21-23 January, 2002, San Jose, [California], USA.  pp.288-296,  2002.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4669
32.

Conference Proceedings
Conference Proceedings
32. Lithography manufacturing implementation for 65 nm and 45 nm nodes with model-based scattering bars using IML technology
Nam, D. ; Milster, T. D. ; Chen, T.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.355-367,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
33.

Conference Proceedings
Conference Proceedings
33. Extending aggressive low-k1 design rule requirements for 90-nm and 65-nm nodes via simultaneous optimization of NA, illumination, and OPC
Roy, S. ; Van Den Broeke, D.J. ; Chen, J.F. ; Liebchen, A. ; Chen, T. ; Hsu, S.D. ; Shi, X. ; Socha, R.J.
Pub. info.: Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA.  pp.190-201,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5379
34.

Conference Proceedings
Conference Proceedings
34. Fluorescence correlation spectroscopy based upon two-photon excitation
Liu, Y. ; Chen, T. ; Luo, Q.
Pub. info.: Biomolecular photonics and multidimensional microscopy : 8-11 June 2003, Wuhan, China.  pp.64-69,  2003.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5255
35.

Conference Proceedings
Conference Proceedings
35. Interactive design and presentation of ceramic sanitary products
Chen, T. ; Yin, G. ; Pan, Z.
Pub. info.: Third International conference on virtual reality and its application in industry : 9-12 April 2002, Hangzhou, China.  pp.259-264,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4756
36.

Conference Proceedings
Conference Proceedings
36. Limits of high modulation bandwidth of VCSELs
Zhao, H.-D. ; He, P. ; Sun, M. ; Wei, H.-P. ; Li, Y. ; Chen, T. ; Liang, L.-W. ; Liu, T.-G.
Pub. info.: Semiconductor and Organic Optoelectronic Materials and Devices.  pp.58-63,  2000.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5624
37.

Conference Proceedings
Conference Proceedings
37. Design of the tapered-fiber-based Bragg gratings for combined second- and third-order dispersion compensation
Ma, L. ; Chen, T. ; Chang, D. ; Jian, S.
Pub. info.: Passive Components and Fiber-based Devices.  pp.150-154,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5623
38.

Conference Proceedings
Conference Proceedings
38. A novel widely continuously tunable laser using a couple of vernier caliper gratings
Chen, T. ; Ma, L. ; Ning, T. ; Jian, S.
Pub. info.: Passive Components and Fiber-based Devices.  pp.951-954,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5623
39.

Conference Proceedings
Conference Proceedings
39. A single-exposure approach for petterning 45 nm flash/DRAM contacthole mask [6283-117]
Chen, T. ; Van Den Broeke, D. ; Tejnil, E. ; Hsu, S. ; Park, S. ; Berger, G. ; Coskun, T. ; De Vocht, J. ; Corcoran, N. ; Chen, F. J. ; van der Heijden, E. ; Finders, J. ; Engelen, A. ; Socha, R.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XIII.  pp.62831A-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6283
40.

Conference Proceedings
Conference Proceedings
40. Percutaneous scaphoid pinning using ultrasound guidance [6141-23]
Beek, M. ; Abolmaesumi, P. ; Chen, T. ; Sellens, R. W. ; Pichora, D.
Pub. info.: Medical Imaging 2006: Visualization, Image-Guided Procedures, and Display.  pp.61410P-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6141
41.

Conference Proceedings
Conference Proceedings
41. A novel ultrasound-guided shoulder arthroscopic surgery [6141-94]
Tyryshkin, K. ; Mousavi, P. ; Beek, M. ; Chen, T. ; Pichora, D. ; Abolmaesumi, P.
Pub. info.: Medical Imaging 2006: Visualization, Image-Guided Procedures, and Display.  pp.61412L-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6141
42.

Conference Proceedings
Conference Proceedings
42. Experimental investigation of photomask with near-field polarization imaging [6349-196]
Chen, T. ; Milster, T. D. ; Yang, S.-H.
Pub. info.: Photomask Technology 2006.  pp.634953-634953,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
43.

Conference Proceedings
Conference Proceedings
43. Precision process calibration and CD predictions for low-k1 lithography [5853-64]
Chen, T. ; Park, S. ; Berger, G. ; Coskun, T. H. ; de Vocht, J. ; Chen, F. ; Yu, L. ; Hsu, S. ; van den Broeke, D. ; Socha, R. ; Park, J. ; Gronlund, K. ; Davis, T. ; Plachecki, V. ; Harris, T. ; Hansen, S. ; Lambson, C.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.785-799,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853
44.

Conference Proceedings
Conference Proceedings
44. DEM generation with PRISM/ALOS simulation data: a case study using airborne three-line scanner imagery [5985-205]
Chen, T. ; Shibasaki, R. ; Shinohara, F. ; Wang, C.
Pub. info.: International Conference on Space Information Technology.  pp.59854U-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5985
45.

Conference Proceedings
Conference Proceedings
45. Experimental evaluation of bull’s-eye illumination for csslst-free random contact printing at sub-65nm node [6154-39]
Finders, J. ; Engelen, A. ; Vandenberghe, G. ; Bekaert, J. ; Chen, T.
Pub. info.: Optical Microlithography XIX.  pp.615412-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
46.

Conference Proceedings
Conference Proceedings
46. Patterning 45nm flash/DRAM contact hole mask with hyper-NA immersion lithography and optimized illumination [6154-60]
Chen, T. ; Van Den Broeke D ; Hsu, S ; Park S ; Berger G ; Coskun T ; De Vocht J ; Corcoran N ; Chen F ; Van der Heijden ; Finders J ; Engelen A ; Socha, R
Pub. info.: Optical Microlithography XIX.  pp.61541O-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
47.

Conference Proceedings
Conference Proceedings
47. Optimization of fuzzy controller based on genetic algorithm [6358-130]
Feng, D. ; Jia, J. ; Chen, T. ; Fei, M.
Pub. info.: Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation.  pp.63583M-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6358
48.

Conference Proceedings
Conference Proceedings
48. Tuning parameters of PID controller based on fuzzy logic controlled genetic algorithms [6358-153]
Feng, D. ; Wang, X. ; Fei, M. ; Chen, T.
Pub. info.: Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation.  pp.635849-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6358
49.

Conference Proceedings
Conference Proceedings
49. Semiconductor pattern analysis with induced polarization [5992-58]
Chen, T. ; Milster, T. ; Yang, S. H.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59921L-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
50.

Conference Proceedings
Conference Proceedings
50. Improvement and application of scanning near-field optical microscope based on a piezoelectric bimorph shear force beam
Chen, T. ; Shi, S. ; Sun, J.L. ; Tan, X.J. ; Tian, G.Y. ; Cao, Y. ; Guo, J.H.
Pub. info.: Nano-Optics and Nano-Structures.  pp.31-35,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4923