1.

Conference Proceedings
Conference Proceedings
1. OBSERVATION OF RING-OSF NUCLEI IN CZ-Si USING SHORT TIME ANNEALING AND IR LIGHT SCATTERING TOMOGRAPHY
Marsden, K. ; Sadamitsu, S. ; Hourai, M. ; Sumita, S. ; Shigematsu, T.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.684-694,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
2.

Conference Proceedings
Conference Proceedings
2. OXYGEN PRECIPITATION BEHAVIOR IN SILICON DURING CZOCHRALSKI CRYSTAL GROWTH
Hourai, M. ; Nagashima, T. ; Kajita, E. ; Miki, S. ; Sumita, S. ; Sano, M. ; Shigematsu, T.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.156-167,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
3.

Conference Proceedings
Conference Proceedings
3. GETTERING TECHNIQUES OF HEAVY METAL IMPURITIES IN SILICON
Sano, M. ; Sumita, S. ; Shigematsu, T. ; Fujino, N.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.784-795,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
4.

Conference Proceedings
Conference Proceedings
4. IMPROVEMENT OF GATE OXIDE INTEGRITY CHARACTERISTICS IN CZ-GROWN Si CRYSTALS BY H2 ANNEALING
Adachi, N. ; Nishikawa, H. ; Komatsu, Y. ; Hourai, H. ; Sano, M ; Shigematsu, T.
Pub. info.: Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A..  pp.815-822,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 262
5.

Conference Proceedings
Conference Proceedings
5. AFM OBSERVATION OF Si (100) SURFACE AFTER HYDROGEN ANNEALING AND WET CHEMICAL PROCESSING
Yanase, Y. ; Horie, H. ; Oka, Y. ; Sano, M. ; Sumita, S. ; Shigematsu, T.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.546-553,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
6.

Conference Proceedings
Conference Proceedings
6. True Atomic Resolution Imaging on Semiconductor Surfaces with Noncontact Atomic Force Microscopy
Sugawara, Y. ; Ueyama, H. ; Uchihashi, T. ; Ohta, M. ; Yanase, Y. ; Shigematsu, T. ; Suzuki, M. ; Morita, S.
Pub. info.: Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.15-,  1997.  Pittsburgh, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 442
7.

Conference Proceedings
Conference Proceedings
7. INFLUENCE OF GROWN - IN DEFECTS IN CZ CRYSTAL ON GATE OXIDE INTEGRITY
Sano, M. ; Hourai, M. ; Sumita, S. ; Shigematsu, T.
Pub. info.: Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing.  pp.3-15,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-15