1.

Conference Proceedings
Conference Proceedings
1. Gettering technologies in advanced low temperature process
Sano, M. ; Ohgushi, S. ; Sadamitsu, S. ; Tsuya, H.
Pub. info.: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II.  pp.281-294,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-22
2.

Conference Proceedings
Conference Proceedings
2. REDUCTION OF GROWN-IN DEFECTS BY HIGH TEMPERATURE ANNEALING
Adachi, N. ; Hisatomi, T. ; Sano, M. ; Tsuya, H.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.698-706,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(1)
3.

Conference Proceedings
Conference Proceedings
3. OXYGEN PRECIPITATION BEHAVIOR IN SILICON DURING CZOCHRALSKI CRYSTAL GROWTH
Hourai, M. ; Nagashima, T. ; Kajita, E. ; Miki, S. ; Sumita, S. ; Sano, M. ; Shigematsu, T.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.156-167,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
4.

Conference Proceedings
Conference Proceedings
4. GETTERING TECHNIQUES OF HEAVY METAL IMPURITIES IN SILICON
Sano, M. ; Sumita, S. ; Shigematsu, T. ; Fujino, N.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.784-795,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
5.

Conference Proceedings
Conference Proceedings
5. RADIAL DISTRIBUTION OF THERMALLY-INDUCED DEFECTS IN HEAVILY BORON-DOPED SILICON WAFERS
Asayama, E. ; Ono, T. ; Takeshita, M. ; Hourai, M. ; Sano, M. ; Tsuya, H.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.546-556,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(1)
6.

Conference Proceedings
Conference Proceedings
6. AFM OBSERVATION OF Si (100) SURFACE AFTER HYDROGEN ANNEALING AND WET CHEMICAL PROCESSING
Yanase, Y. ; Horie, H. ; Oka, Y. ; Sano, M. ; Sumita, S. ; Shigematsu, T.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.546-553,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
7.

Conference Proceedings
Conference Proceedings
7. Intrinsic Gettering of Nickel and Copper for Advanced Low-Temperature Device Processes
Ogushi, S. ; Reilly, N. ; Sadamitsu, S. ; Koike, Y. ; Sano, M.
Pub. info.: Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.227-,  1998.  Warrendale, Pa.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 510
8.

Conference Proceedings
Conference Proceedings
8. Formation of mesoscopic polymer dots by rubbing transfer
Sano, M. ; Okamura, J. ; Shinkai, S.
Pub. info.: Organic/inorganic hybrid materials II : symposium held April 5-9, 1999, San Francisco, California, U.S.A..  pp.155-,  1999.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 576
9.

Conference Proceedings
Conference Proceedings
9. Investigation of the Effect of Thermal History on Ring-OSF Formation in CZ-Silicon Crystals
Kelly, G. P. ; Hourai, M. ; Umeno, S. ; Sano, M. ; Tsuya, H.
Pub. info.: Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.21-,  1998.  Warrendale, Pa.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 510
10.

Conference Proceedings
Conference Proceedings
10. INFLUENCE OF GROWN - IN DEFECTS IN CZ CRYSTAL ON GATE OXIDE INTEGRITY
Sano, M. ; Hourai, M. ; Sumita, S. ; Shigematsu, T.
Pub. info.: Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing.  pp.3-15,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-15
11.

Conference Proceedings
Conference Proceedings
11. Tea catechin (EGCG) and its metabolites as bioantioxidants
Tomita, I. ; Sano, M. ; Sasaki, K. ; Miyase, T.
Pub. info.: Fruits, vegetables, and teas.  pp.209-216,  1998.  Washington, DC.  American Chemical Society
Title of ser.: ACS symposium series
Ser. no.: 701
12.

Conference Proceedings
Conference Proceedings
12. Defects Behavior on p/p+ Epitaxial Wafers During Low Temperature Device Processing
Hourai, M. ; Asayama, E. ; Onno, T. ; Sano, M. ; Tsuya, H.
Pub. info.: Proceedings of the Fourth International Symposium on High Purity Silicon.  pp.214-225,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-13
13.

Technical Paper
Technical Paper
13. Desired trajectory and guidance force generators for an aircraft
Baba, Y. ; Takano, H. ; Sano, M.
Pub. info.: AIAA paper.  pp.1-9,  1996.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA Guidance Navigation and Control Conference
Ser. no.: 1996