1.

Conference Proceedings
Conference Proceedings
1. NITROGEN CONTAMINATION IN SIMOX WAFER
Davis, G. E. ; Jones, K. S. ; Prussin, S.
Pub. info.: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.111-116,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 107
2.

Conference Proceedings
Conference Proceedings
2. DEFECT STRUCTURES GENERATED BY BURIED AMORPHOUS LAYER REGROWTH IN <10> ARSENIC IMPLANTED SILICON
Jones, K.S. ; Prussin, S.
Pub. info.: Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.173-178,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 71
3.

Conference Proceedings
Conference Proceedings
3. THE EFFECT OF IMPLANT SPECIES ON THE STABILITY OF ION IMPLANTATION DAMAGE
Jones, K. S. ; Prussin, S. ; Venables, D.
Pub. info.: Fundamentals of beam-solid interactions and transient thermal processing : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.277-282,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 100
4.

Conference Proceedings
Conference Proceedings
4. ROLE OF IMPLANT ENERGY ON DEFECT STRUCTURES FOR PHOSPHOROUS IMPLATED SILICON
Prussin, S. ; Jones, K.S.
Pub. info.: Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.191-196,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 71