1.

Conference Proceedings
Conference Proceedings
1. Optical switch array based on microforming process
Hashiura, Y. ; Ikehara, T. ; Kitajima, A. ; Goto, H. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia.  pp.414-421,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4592
2.

Conference Proceedings
Conference Proceedings
2. Si-based multilayered print circuit board for MEMS packaging fabricated by Si deep etching, bonding, and vacuum metal casting
Murakoshi, Y. ; Hanada, K. ; Li, Y. ; Uchino, K. ; Suzuki, T. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia.  pp.473-480,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4592
3.

Conference Proceedings
Conference Proceedings
3. Microneedle array and insertion guide array for safe use of biomedical applications
Khumpuang, S. ; Maeda, R. ; Sugiyama, S.
Pub. info.: BioMEMS and nanotechnology : 10-12 December 2003, Perth, Australia.  pp.231-238,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5275
4.

Conference Proceedings
Conference Proceedings
4. High-aspect-ratio fabrications of micro journal air bearings for micro gas turbine engine
Shan, X.C. ; Murakoshi, Y. ; Wang, Z. ; Lu, H.J. ; Jin, Y. ; Ikehara, T. ; Maeda, R. ; Wong, C.K.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.428-433,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
5.

Conference Proceedings
Conference Proceedings
5. Formation and its characteristics of PLZT layered film structure for transducers
Ichiki, M. ; Kobayashi, T. ; Morikawa, Y. ; Mabune, Y. ; Nakada, T. ; Nonaka, K. ; Endo, C. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.400-407,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
6.

Conference Proceedings
Conference Proceedings
6. Preparation of PZT films derived by hybrid processing for MEMS application
Yan, L. ; Wang, Z.J.M. ; Kokawa, H. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.414-421,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
7.

Conference Proceedings
Conference Proceedings
7. An Easy Fabrication Technique for Micro Paraffin Actuator and Application to Microvalve
Kobayashi, T. ; Matsuoka, S. ; Ueno, A. ; Maeda, R.
Pub. info.: Microfabricated systems and MEMS VII : proceedings of the international symposium.  pp.330-335,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-09
8.

Conference Proceedings
Conference Proceedings
8. Electrical and mechanical properties of PZT thin films prepared by hybrid process of sol-gel technique and laser ablation
Zhang, L. ; Ichiki, M. ; Wang, Z.-J. ; Maeda, R.
Pub. info.: Smart materials II : 16-18 December 2002, Melbourne, Australia.  pp.30-37,  2002.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4934
9.

Conference Proceedings
Conference Proceedings
9. In situ deposition of epitaxial PZT films by pulsed laser deposition
Wang, Z. J. ; Yan, L. J. ; Kokawa, H. ; Maeda, R.
Pub. info.: Smart materials III : 13-15 December 2004, Sydney, Australia.  pp.89-96,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5648
10.

Conference Proceedings
Conference Proceedings
10. Deposition of Pb(Zr XTi1-X )03 thin films by pulsed laser ablation for MEMS application
Wang, Z.-J. ; Maeda, R. ; Kokawa, H.
Pub. info.: Smart materials II : 16-18 December 2002, Melbourne, Australia.  pp.356-363,  2002.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4934
11.

Conference Proceedings
Conference Proceedings
11. Biomimetic actuator based on dielectric polymer
Choi, H. ; Ryew, S. ; Jung, K. ; Jeon, J.W. ; Kim, H. ; Nam, J.-D. ; Takanishi, A. ; Maeda, R. ; Kaneko, K. ; Tanie, K.
Pub. info.: Smart structures and materials 2002 : electroactive polymer actuators and devices (EAPAD) : 18-21 March 2002, San Diego, USA.  pp.138-149,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4695
12.

Conference Proceedings
Conference Proceedings
12. Micro Powder Injection Molding of Metal Microstructures
Loh, N.H. ; Tor, S.B. ; Tay, B.Y. ; Murakoshi, Y. ; Maeda, R.
Pub. info.: THERMEC '2003 : International Conference on Processing & Manufacturing of Advanced Materials, July 7-11, 2003, Leganés, Madrid, Spain.  pp.4289-4294,  2003.  Zuerich-Uetikon, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 426-432
13.

Conference Proceedings
Conference Proceedings
13. Sol-gel deposition of PZT thick film on Pt/Ti/SOI substrate and application to 2D micro scanning mirror
Kobayashi, T. ; Tsaur, J. ; Ichiki, M. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.524-531,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
14.

Conference Proceedings
Conference Proceedings
14. Micro hot embossing for high-aspect-ratio structure with materials flow enhancement by polymer sheet
Murakoshi, Y. ; Shan, X.-C. ; Sano, T. ; Takahashi, M. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.532-539,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
15.

Conference Proceedings
Conference Proceedings
15. Recent development of micropore optics using MEMS technologies [6266-48]
Ezoe, Y. ; Koshiishi, M. ; Mita, M. ; Mitsuda, K. ; Ishisaki, T. ; Hoshino, A. ; Yang, Z. ; Takano, T. ; Mekaru, H. ; Maeda, R.
Pub. info.: Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray.  pp.62661B-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6266
16.

Conference Proceedings
Conference Proceedings
16. Development of a micro hot embossing process for fabricating micro-optical devices (Invited Paper)
Shan, X.C. ; Maeda, R. ; Murakoshi, Y.
Pub. info.: Nano- and Microtechnology: Materials, Processes, Packaging, and Systems.  pp.67-75,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4936
17.

Conference Proceedings
Conference Proceedings
17. Resonant-typed microscanners fabricated by hybrid PZT deposition process on SOI wafers
Tsaur, J.-J. ; Wang, Z.J. ; Zhang, L. ; Ichiki, M. ; Maeda, R. ; Suga, T.
Pub. info.: Nano- and Microtechnology: Materials, Processes, Packaging, and Systems.  pp.215-224,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4936
18.

Conference Proceedings
Conference Proceedings
18. A world-to-chip socket for microfluidic prototype development
Yang, Z. ; Maeda, R.
Pub. info.: Nano- and Microtechnology: Materials, Processes, Packaging, and Systems.  pp.98-104,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4936
19.

Conference Proceedings
Conference Proceedings
19. Microfabrication of thick and bulk PZT materials for piezoelectric actuator
Lee, S.H. ; Maeda, R. ; Esashi, M.
Pub. info.: Nano- and Microtechnology: Materials, Processes, Packaging, and Systems.  pp.365-372,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4936
20.

Conference Proceedings
Conference Proceedings
20. Optimization of Au mask fabrication processes for LIGA applications
Shan, X.C. ; Maeda, R. ; Ikehara, T. ; Mekaru, H. ; Hattori, T.
Pub. info.: Nano- and Microtechnology: Materials, Processes, Packaging, and Systems.  pp.356-364,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4936
21.

Conference Proceedings
Conference Proceedings
21. Microsensors and actuator arrays based on Pb(Zr,Ti) O3 thin film for AFM data storage
Chu, J. ; Lu, J. ; Wu, Y. ; Huang, W. ; Maeda, R. ; Itoh, T. ; Suga, T.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.379-383,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
22.

Conference Proceedings
Conference Proceedings
22. Development of a MEMS-based micro combustor for a micro gas turbine engine
Shan, X. C. ; Jin, Y. F. ; Wang, Z. F. ; Wang, C. K. ; Murakoshi, Y. ; Maeda, R.
Pub. info.: Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II.  pp.337-344,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5650