Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part2 pp.872-881, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Applications of photonic technology 3 : closing the gap between theory, development, and application. pp.538-543, 1998. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Physics and simulation of optoelectronic devices VII : 25-29 January 1999, San Jose, USA. pp.747-755, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part2 pp.956-963, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Photodetectors : materials and devices III : 28-30 January 1998, San Jose, California. pp.88-95, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 1997 : smart structures and integrated systems : 3-6 March 1997, San Diego, California. pp.506-515, 1997. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Digital compression technologies and systems for video communications : 7-9 October 1996, Berlin, FRG. pp.683-688, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Optics for science and new technology : 17th Congress of the International Commission for Optics, August 19-23, 1996, Hotel Riviera(Yusong), Taejon Korea. Part2 pp.812-813, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part2 pp.939-947, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI : 11-13 March 1996, Santa Clara, California. pp.372-382, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Optics for science and new technology : 17th Congress of the International Commission for Optics, August 19-23, 1996, Hotel Riviera(Yusong), Taejon Korea. Part2 pp.758-759, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part2 pp.1134-1140, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Physics and Simulation of Optoelectronic Devices VI. Part 2 pp.875-882, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering