1.

Conference Proceedings

Conference Proceedings
Lukyanchikova, N. R. ; Garbar, N. ; Smolanka, A. ; Simoen, E. ; Mercha, A. ; Claeys, C.
Pub. info.: Noise in devices and circuits II : 26-28 May 2004, Maspalomas, Gran Canaria, Spain.  pp.208-214,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5470
2.

Conference Proceedings

Conference Proceedings
Mercha, A. ; Simoen, E. ; Decoutere, S. ; Claeys, C.
Pub. info.: Noise in devices and circuits II : 26-28 May 2004, Maspalomas, Gran Canaria, Spain.  pp.193-207,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5470
3.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Claeys, C. ; Job, R. ; Ulyashin, A.G. ; Fahrner, W.R. ; Tonelli, G. ; Degryse, O. ; Clauws, P.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.912-924,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
4.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Claeys, C. ; Job, R. ; Ulyashin, A.G. ; Fahrner, W.R. ; Tonelli, G. ; Degryse, O. ; Clauws, P.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.912-926,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
5.

Conference Proceedings

Conference Proceedings
Poyai, A. ; Simoen, E. ; Claeys, C. ; Rooyackers, R. ; Badenes, G. ; Gaubas, E.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  pp.403-413,  2000.  Bellingham, Wash..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-17
6.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Mercha, A. ; Claeys, C.
Pub. info.: Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium.  pp.153-172,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-2
7.

Conference Proceedings

Conference Proceedings
Camillo, L.M. ; Martino, J.A. ; Simoen, E. ; Claeys, C.
Pub. info.: Silicon-on-insulator technology and devices XII : proceedings of the international symposium.  pp.119-124,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-03
8.

Conference Proceedings

Conference Proceedings
Srinivasan, P. ; Simoen, E. ; Pantisano, L. ; Claeys, C. ; Misra, D.
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium.  pp.151-160,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-05
9.

Conference Proceedings

Conference Proceedings
Poyai, A. ; Rittaporn, I. ; Simoen, E. ; Claeys, C. ; Rooyackers, R.
Pub. info.: High purity silicon VIII : proceedings of the international symposium.  pp.307-316,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-05
10.

Conference Proceedings

Conference Proceedings
Ulyashin, A. ; Simoen, E. ; Camel, L. ; De Wolf, S. ; Dekkers, H. ; Rafi, J.M. ; Beaucarne, G. ; Poortmans, J. ; Claeys, C.
Pub. info.: High purity silicon VIII : proceedings of the international symposium.  pp.334-345,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-05
11.

Conference Proceedings

Conference Proceedings
Neimash, M.V. ; Kras'ko, M. ; Kraitchinskii, A, ; Voytovych, V. ; Kabaldin, O. ; Tsmots, V. ; Simoen, E. ; Claeys, C.
Pub. info.: High purity silicon VIII : proceedings of the international symposium.  pp.286-294,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-05
12.

Conference Proceedings

Conference Proceedings
Martino, J.A. ; Rafi, J.M. ; Mercha, A. ; Simoen, E. ; Claeys, C.
Pub. info.: High purity silicon VIII : proceedings of the international symposium.  pp.346-356,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-05
13.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Claeys, C. ; Neimash, V.B. ; Kraitchinskii, A. ; Kras'ko, M. ; Puzenko, O. ; Blondeel, A. ; Clauws, P.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  pp.223-235,  2000.  Bellingham, Wash..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-17
14.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Rafi, J.M. ; Mercha, A. ; De Meyer, K. ; Claeys, C. ; Kokkoris, M. ; Kossionides, E. ; Fanourakis, G. ; Mohhaindzadeh, A.
Pub. info.: Microelectronics technology and devices : SBMICRO 2003 : proceedings of the eighteenth international symposium.  pp.18-27,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-9
15.

Conference Proceedings

Conference Proceedings
David, M.-L. ; Simoen, E. ; Claeys, C. ; Neimash, V. ; Kras'ko, M. ; Kraitchinski, A. ; Voytovuch, V. ; Tishcenko, V. ; Barbot, J.F.
Pub. info.: High purity silicon VIII : proceedings of the international symposium.  pp.395-406,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-05
16.

Conference Proceedings

Conference Proceedings
Evtukh, A. ; Kizjak, A. ; Litovchenko, V. ; Claeys, C. ; Simoen, E.
Pub. info.: Science and technology of semiconductor-on-insulator structures and devices operating in a harsh environment.  pp.221-226,  2005.  Dordrecht.  Kluwer Academic Publishers
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 185
17.

Conference Proceedings

Conference Proceedings
Claeys, C. ; Simoen, E.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.50-65,  2004.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-01
18.

Conference Proceedings

Conference Proceedings
Job, R. ; Ulyashin, A.G. ; Huang, Y.L. ; Fahrner, W.R. ; Simoen, E. ; Claeys, C. ; Niedernostheide, F.-J. ; Schulze, H.-J. ; Tonelli, G.
Pub. info.: Defect and impurity engineered semiconductors and devices III : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.257-262,  2002.  Warrendale, Pa.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 719
19.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Mercha, A. ; Claeys, C.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah.  pp.420-439,  2003.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5133
20.

Conference Proceedings

Conference Proceedings
Rafi, J.M. ; Simoen, E. ; Claeys, C. ; Ulyashin, A. ; Job, R. ; Fahrner, W. ; Versluys, J. ; Clauws, P. ; Lozano, M. ; Campabadal, F.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah.  pp.96-105,  2003.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5133
21.

Conference Proceedings

Conference Proceedings
Agopian, P. G. ; Martino, J. A. ; Simoen, E. ; Claeys, C.
Pub. info.: Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium.  pp.512-519,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-08
22.

Conference Proceedings

Conference Proceedings
Galeti, M. ; Martino, J. A. ; Simoen, E. ; Claeys, C.
Pub. info.: Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium.  pp.538-547,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-08
23.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Hayama, K. ; Takakura, K. ; Mercha, A. ; Claeys, C. ; Ohyama, H.
Pub. info.: Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium.  pp.455-463,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-08
24.

Conference Proceedings

Conference Proceedings
Eneman, G. ; Simoen, E. ; Delhougne, R. ; Verheyen, P. ; Simons, V. ; Loo, R. ; Caymax, M. ; De Meyer, K. ; Vandervorst, W. ; Claeys, C.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.338-348,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-06
25.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Eneman, G. ; Verheyen, P. ; Delhougne, R. ; Rooyackers, R. ; Loo, R. ; Vandervorst, W. ; De Meyer, K. ; Claeys, C.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.349-359,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-06
26.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Huang, Y. L. ; Claeys, C. ; Raft, J. M. ; Job, R. ; Fahrner, W. R. ; Versluys, J. ; Clauws, P.
Pub. info.: Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France.  pp.165-175,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-10
27.

Conference Proceedings

Conference Proceedings
Pavanello, M.A. ; Martino, J.A. ; Simoen, E. ; Claeys, C.
Pub. info.: Silicon-on-insulator technology and devices XII : proceedings of the international symposium.  pp.289-294,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-03
28.

Conference Proceedings

Conference Proceedings
Claeys, C. ; Simoen, E.
Pub. info.: Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium.  pp.73-89,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-08
29.

Conference Proceedings

Conference Proceedings
Claeys, C. ; Simoen, E. ; Litovchenko, V.G. ; Evtukh, A. ; Efremov, A. ; Kizjak, A. ; Rassamakin, Ju.
Pub. info.: Progress in SOI structures and devices operating at extreme conditions.  pp.211-220,  2002.  Dordrecht.  Kluwer Academic Publishers
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 58
30.

Conference Proceedings

Conference Proceedings
Poyai, A. ; Simoen, E. ; Claeys, C.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah.  pp.386-395,  2003.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5133
31.

Conference Proceedings

Conference Proceedings
Pavanello, M. A. ; Martino, J. A. ; Simoen, E. ; Claeys, C.
Pub. info.: Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium.  pp.464-471,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-08
32.

Conference Proceedings

Conference Proceedings
Pavanello, M. A. ; Martino, J. A. ; Simoen, E. ; Claeys, C.
Pub. info.: Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium.  pp.21-26,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-03
33.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Rafi, J.M. ; Mercha, A. ; Serra-Gallifa, X. ; van Meer, H. ; De Meyer, K. ; Claeys, C. ; Kokkoris, M. ; Kossionides, E. ; Fanourakis, G.
Pub. info.: Silicon-on-insulator technology and devices XI : proceedings of the international symposium.  pp.437-442,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-5
34.

Conference Proceedings

Conference Proceedings
Nicolett, A.S. ; Martino, J.A. ; Simoen, F. ; Claeys, C.
Pub. info.: Microelectronics technology and devices : SBMICRO 2002 : proceedings of the seventeenth international symposium.  pp.28-34,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-8
35.

Conference Proceedings

Conference Proceedings
Poyai, A. ; Simoen, E. ; Claeys, C. ; Rooyackers, R. ; Redolfi, A.
Pub. info.: Microelectronics technology and devices : SBMICRO 2002 : proceedings of the seventeenth international symposium.  pp.213-222,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-8
36.

Conference Proceedings

Conference Proceedings
Pavanello, M.A. ; Martino, J.A. ; Mercha, A. ; Rafi, J.M. ; Simoen, E. ; Claeys, C. ; van Meer, H. ; De Meyer, K.
Pub. info.: Microelectronics technology and devices : SBMICRO 2002 : proceedings of the seventeenth international symposium.  pp.205-212,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-8
37.

Conference Proceedings

Conference Proceedings
Poyai, A. ; Sitnoen, E. ; Claeys, C.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah.  pp.386-395,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-3
38.

Conference Proceedings

Conference Proceedings
Lukyanchikova, N. ; Garbar, N. ; Smolanka, A. ; Simoen, E. ; Claeys, C.
Pub. info.: Science and technology of semiconductor-on-insulator structures and devices operating in a harsh environment.  pp.255-260,  2005.  Dordrecht.  Kluwer Academic Publishers
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 185
39.

Conference Proceedings

Conference Proceedings
Pavanello, M.A. ; Martino, J.A. ; Simoen, E. ; Mercha, A. ; Claeys, C. ; Dc Meyer, K.
Pub. info.: Microelectronics technology and devices : SBMICRO 2003 : proceedings of the eighteenth international symposium.  pp.112-119,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-9
40.

Conference Proceedings

Conference Proceedings
Raft, J.M. ; Simoen, E. ; Claeys, C. ; Ulyashin, A. ; Job, R. ; Fahrner, W. ; Versluys, J. ; Clauws, P. ; Lozano, M ; Campabadal, F.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah.  pp.96-105,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-3
41.

Conference Proceedings

Conference Proceedings
Poyai, A. ; Simoen, E. ; Claeys, C. ; Huber, A. ; Graef, D. ; Gaubas, E.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.694-706,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
42.

Conference Proceedings

Conference Proceedings
Claeys, C. ; Ikegami, M. ; Kobayashi, K. ; Nakabayashi, M. ; Ohyama, H. ; Simoen, E. ; Sunaga, H. ; Takami, Y. ; Takizawa, H. ; Yoneoka, M.
Pub. info.: Amorphous and heterogeneous silicon thin films - 2000 : symposium held April 24-28, 2000, San Francisco, California, U.S.A..  pp.A29.3-,  2001.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 609
43.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Mercha, A. ; Claeys, C.
Pub. info.: Advanced experimental methods for noise research in nanoscale electronic devices.  pp.121-128,  2004.  Dordrecht.  Kluwer Academic Publishers
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 151
44.

Conference Proceedings

Conference Proceedings
Poyai, A. ; Simoen, E. ; Claeys, C. ; Rooyackers, R.
Pub. info.: High purity silicon VII : proceedings of the international symposium.  pp.266-277,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-20
45.

Conference Proceedings

Conference Proceedings
Huang, Y.L. ; Simoen, E. ; Job, R. ; Claeys, C. ; Dungen, W. ; Ma, Y. ; Fahrner, W.R. ; Versluys, J. ; Clauws, P.
Pub. info.: Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.307-312,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 864
46.

Conference Proceedings

Conference Proceedings
Nicolett, A.S. ; Martino, J.A. ; Simoen, E. ; Claeys, C.
Pub. info.: Microelectronics technology and devices : SBMICRO 2002 : proceedings of the seventeenth international symposium.  pp.430-436,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-8
47.

Conference Proceedings

Conference Proceedings
Job, R. ; Ulyashin, A.G. ; Ma, Y. ; Fahnwr, W.R. ; Simoen, E. ; Rafi, J.M. ; Claeys, C. ; Niedernostheide, F.J. ; Schulze, H.J.
Pub. info.: High purity silicon VII : proceedings of the international symposium.  pp.141-154,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-20
48.

Conference Proceedings

Conference Proceedings
Lukyanchikova, N. ; Simoen, E. ; Mercha, A. ; Claeys, C.
Pub. info.: Advanced experimental methods for noise research in nanoscale electronic devices.  pp.129-136,  2004.  Dordrecht.  Kluwer Academic Publishers
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 151
49.

Conference Proceedings

Conference Proceedings
Gryse, O. De ; Clauws, P. ; Vanhellemont, J. ; Lebedev, O. ; Van Landuyt, J. ; Simoen, E. ; Claeys, C.
Pub. info.: High purity silicon VII : proceedings of the international symposium.  pp.183-196,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-20
50.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Claeys, C. ; Poyai, A.
Pub. info.: Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany.  pp.75-92,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-29