1.

Conference Proceedings

Conference Proceedings
Trauwaert, M.-A. ; Vanhellemont, J. ; Simoen, E. ; Claeys, C. ; Johlander, B. ; Harboe-Sorensen, R. ; Adams, L. ; Clauws, P.
Pub. info.: Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.93-98,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 279
2.

Conference Proceedings

Conference Proceedings
Ohyama, H. ; Simoen, E. ; Claeys, C. ; Takami, Y. ; Kawamura, K. ; Hakata, T. ; Sunaga, H. ; Ogita, Y.
Pub. info.: Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.289-294,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-23
3.

Conference Proceedings

Conference Proceedings
Vanhellemont, J. ; Simoen, E. ; Bosman, G. ; Claeys, C. ; Kaniava, A. ; Gaubas, E. ; Blondeel, A. ; Clauws, P.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.670-683,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
4.

Conference Proceedings

Conference Proceedings
Croon, J. ; Biesemans, S. ; Kubicek, S. ; Simoen, E. ; De Meyer, K. ; Claeys, C.
Pub. info.: Proceedings of the fourth Symposium on Low Temperature Electronics and High Temperature Superconductivity.  pp.187-198,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-2
5.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Claeys, C.
Pub. info.: Proceedings of the fourth Symposium on Low Temperature Electronics and High Temperature Superconductivity.  pp.117-139,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-2
6.

Conference Proceedings

Conference Proceedings
Czerwinski, A. ; Simoen, E. ; Poyai, A. ; Claeys, C.
Pub. info.: Proceedings of the Third International Symposium on Defects in Silicon.  pp.88-99,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-1
7.

Conference Proceedings

Conference Proceedings
Nicolett, A.S. ; Martino, J.A. ; Simoen, E. ; Claeys, C.
Pub. info.: Proceedings of the fourth Symposium on Low Temperature Electronics and High Temperature Superconductivity.  pp.159-170,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-2
8.

Conference Proceedings

Conference Proceedings
Kissinger, G. ; Vanhellemont, J. ; Graef, D. ; Zulehner, W. ; Claeys, C. ; Richter, H.
Pub. info.: ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands.  pp.156-164,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-30
9.

Conference Proceedings

Conference Proceedings
Litovchenko, V.G. ; Romanyuk, B.N. ; Efremov, A.A. ; Mel'nik, V.P. ; Claeys, C.
Pub. info.: Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.81-85,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-23
10.

Conference Proceedings

Conference Proceedings
Libezny, M. ; Kaniava, A. ; Kissinger, G. ; Nijs, J. ; Claeys, C. ; Vanhellemont, J.
Pub. info.: ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands.  pp.165-172,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-30
11.

Conference Proceedings

Conference Proceedings
Neimash, V.B. ; Siratskii, V.M. ; Kraichinskii, A.M. ; Puzenko, O.O. ; Claeys, C. ; Simoen, E.
Pub. info.: Proceedings of the Fifth International Symposium on High Purity Silicon V.  pp.200-210,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-13
12.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Poyai, A. ; Claeys, C. ; Czerwinski, A. ; Katcki, J.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1576-1592,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
13.

Conference Proceedings

Conference Proceedings
Rotondaro, A.L.P. ; Meuris, M. ; Schmidt, H.F. ; Heyns, M.M. ; Vandervorst, W. ; Claeys, C. ; Hellemans, L. ; Snauvaert, I.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.581-586,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
14.

Conference Proceedings

Conference Proceedings
Lukyanchikova, N. ; Petrichuk, M. ; Garbar, N. ; Simoen, E. ; Claeys, C.
Pub. info.: Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.203-214,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-23
15.

Conference Proceedings

Conference Proceedings
Dierickx, B. ; Simoen, E. ; Vermeiren, J. ; Cos, S. ; Claeys, C. ; Declerck, G.
Pub. info.: Proceedings of the ESA Electronic Components Conference, held at the Conference Centre, ESTEC, Noordwijk, the Netherlands, 12-16 November 1990.  pp.43-48,  1991.  Paris.  ESA Publications Division
Title of ser.: ESA SP
Ser. no.: 313
16.

Conference Proceedings

Conference Proceedings
Claeys, C. ; Simoen, E.
Pub. info.: Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.36-50,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-3
17.

Conference Proceedings

Conference Proceedings
Gaubas, E. ; Vanhellemont, J. ; Simoen, E. ; Claeys, C. ; Clauws, P. ; Kraner, H.W. ; Vilkelis, G.
Pub. info.: Proceedings of the Fourth International Symposium on High Purity Silicon.  pp.439-449,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-13
18.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Poyai, A. ; Claeys, C. ; Czerwinski, A.
Pub. info.: Proceedings of the Fifth International Symposium on High Purity Silicon V.  pp.410-421,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-13
19.

Conference Proceedings

Conference Proceedings
Czerwinski, A. ; Tomaszewski, D. ; Gibki, J. ; Bakowski, A. ; Klima, K. ; Katcki, J. ; Simoen, E. ; Claeys, C.
Pub. info.: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II.  pp.218-227,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-22
20.

Conference Proceedings

Conference Proceedings
Ohyama, H. ; Simoen, E. ; Claeys, C. ; Vanhellemont, J. ; Takami, Y. ; Hayama, T. ; Sunaga, H. ; Kobayashi, K.
Pub. info.: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II.  pp.143-152,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-22
21.

Conference Proceedings

Conference Proceedings
Hakata, T. ; Ohyama, H. ; Simoen, E. ; Claeys, C. ; Takami, Y. ; Kawamura, K. ; Miyahara, K. ; Hososhima, M.
Pub. info.: Semiconductors for room-temperature radiation detector applications II : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A..  pp.387-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 487
22.

Conference Proceedings

Conference Proceedings
Kudou, T. ; Ohyama, H. ; Simoen, E. ; Claeys, C. ; Takami, Y. ; Shigaki, K. ; Fujii, A. ; Sunaga, H.
Pub. info.: Semiconductors for room-temperature radiation detector applications II : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A..  pp.471-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 487
23.

Conference Proceedings

Conference Proceedings
Hakata, T. ; Ohyama, H. ; Simoen, E. ; Claeys, C. ; Sunaga, H. ; Kobayashi, K. ; Hososhima, M.
Pub. info.: Semiconductors for room-temperature radiation detector applications II : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A..  pp.435-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 487
24.

Conference Proceedings

Conference Proceedings
Ohyama, H. ; Hakata, T. ; Simoen, E. ; Claeys, C. ; Takami, Y. ; Hayama, K. ; Tokuyama, J. ; Shigaki, K. ; Kobayashi, K. ; Sunaga, H. ; Miyahara, K. ; Hososhima, M.
Pub. info.: Semiconductors for room-temperature radiation detector applications II : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A..  pp.429-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 487
25.

Conference Proceedings

Conference Proceedings
Rotondaro, A. L. P. ; Hurd, T. Q. ; Schmidt, H. F. ; Teerlinck, I. ; Heyns, M. M. ; Claeys, C.
Pub. info.: Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA.  pp.183-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 386
26.

Conference Proceedings

Conference Proceedings
Ohyama, H. ; Simoen, E. ; Claeys, C. ; Takami, Y. ; Hayama, K. ; Hakata, T. ; Tokuyama, J. ; Kobayashi, K. ; Sunaga, H. ; Poortmans, J. ; Caymax, M.
Pub. info.: Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.99-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 533
27.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Heyns, M.M. ; Claeys, C. ; Brown, G.
Pub. info.: ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands.  pp.54-63,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-30
28.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Vanhellemont, J. ; Kaniava, A. ; Claeys, C.
Pub. info.: Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects.  pp.72-81,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-1
29.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Vandamme, E. ; Rotondaro, A.L.P. ; Claeys, C.
Pub. info.: Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.318-323,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-11
30.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Magnusson, U. ; Born, I. ; Vlummens, J. ; Claeys, C. ; Coenen, S. ; Decreton, M.
Pub. info.: Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.375-380,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-11
31.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Claeys, C.
Pub. info.: Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.290-295,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-11
32.

Conference Proceedings

Conference Proceedings
Vanhellemont, J. ; Kaniava, A. ; Libezny, M. ; Simoen, E. ; Kissinger, G. ; Gaubas, E. ; Claeys, C. ; Clauws, P.
Pub. info.: Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A..  pp.35-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 378
33.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Claeys, C.
Pub. info.: The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface.  pp.477-484,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-1
34.

Conference Proceedings

Conference Proceedings
Martino, J.A. ; Simoen, E. ; Claeys, C.
Pub. info.: Proceedings of the Symposium on Low Temperature Electronics and High Temperature Superconductivity.  pp.271-277,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-9
35.

Conference Proceedings

Conference Proceedings
Simoen, E. ; Claeys, C.
Pub. info.: Proceedings of the Symposium on Low Temperature Electronics and High Temperature Superconductivity.  pp.251-259,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-9
36.

Conference Proceedings

Conference Proceedings
Claeys, C. ; Simoen, E. ; Vanhellemont, J.
Pub. info.: Proceedings of the Fourth International Symposium on High Purity Silicon.  pp.305-324,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-13
37.

Conference Proceedings

Conference Proceedings
Rotondaro, A.L.P. ; Honda, K. ; Maw, T. ; Perry, D. ; Lux, M. ; Heyns, M.M. ; Claeys, C. ; Darakchiev, I.
Pub. info.: Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.537-543,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-20