1.

Conference Proceedings
Conference Proceedings
1. Thermodynamics and Kinetics of Methyltricyhiorosilane Decomposition
Allendorf, M.D. ; Melius, C.F. ; Osterheld, T.H.
Pub. info.: Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition.  pp.20-26,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-2
2.

Conference Proceedings
Conference Proceedings
2. Thermochemistry of Gas-Phase Species Relevant to Titanium Nitride CVD
Allendorf, M.D. ; Janssen, C.L. ; Colvin, M.E. ; Melius, C.F. ; Nielsen, I.M.B. ; Osterheld, T.H. ; Ho, P.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.393-400,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2
3.

Conference Proceedings
Conference Proceedings
3. Chemical Reactions in the CVD of Boron Nitride from BCI, and NH3
Allendorf, M.D. ; Osterheld, T.H.
Pub. info.: Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition.  pp.16-22,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-5