Watt, V.H.C. ; Nakatani, D. ; Moinpour, M. ; Hwang, D. ; Lu, W.
Pub. info.:
Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.328-337, 1994. Pennington, NJ. Electrochemical Society
Watt, V. H. C. ; Moinpour, M. ; Sadjadi, R. ; Lu, W. ; Neubauer, G. ; Bower, R.
Pub. info.:
Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA. pp.377-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society