1.
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Conference Proceedings
|
Zhang, G. ; Wang, C. ; Tan, C.L. ; Ilzhoefer, J.R. ; Atkinson, C. ; Renwick, S.P. ; Slonaker, S.D. ; Godfrey, D. ; Fruga, C.H.
Pub. info.: |
Optical Microlithography XVI. Part One pp.45-56, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5040 |
|
2.
|
Conference Proceedings
|
Wang, C. ; Zhang, G. ; Tan, C.L. ; Atkinson, C. ; Boehm, M.A. ; Brown, J.M. ; Godfrey, D. ; Littau, M.E. ; Raymond, C.J.
Pub. info.: |
Optical Microlithography XVI. Part Three pp.1456-1464, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5040 |
|