Paulson, W. M. ; Breaux, L. H. ; Hegde, R. I. ; Tobin, P. J.
Pub. info.:
Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.397-, 1994. Pittsburgh. MRS - Materials Research Society
Paulson, W. M. ; Hegde, R. I. ; Doris, B. B. ; Kaushik, V. ; Tobin, P. J. ; Fitch, J. ; McGahan, W. A. ; Woollam, J. A.
Pub. info.:
Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA. pp.77-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Paulson, W. M. ; Tobin, P. J. ; Tseng, H-H. ; Maiti, B. ; Gelatos, C. ; Hegde, R. I. ; Anderson, S. G. H.
Pub. info.:
Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A.. pp.77-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society