1.

Conference Proceedings
Conference Proceedings
1. Mask transmission resonance in bi-layer masks
V. Philipsen ; P. De Bisschop ; K. Mesuda
Pub. info.: Photomask and next-generation lithography mask technology XV.  1  pp.702815-1-702815-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7028
2.

Conference Proceedings
Conference Proceedings
2. Impact of alternative mask stacks on the imaging performance at NA 1.20 and above
V. Philipsen ; K. Mesuda ; P. De Bisschop ; A. Erdmann ; G. Citarella
Pub. info.: Photomask technology 2007.  1  pp.67301N-1-67301N-12,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730