1.
|
Conference Proceedings
|
Kim, S.-H. ; Kim, H.-D. ; Lee, S.-H. ; Park, C.-M. ; Ryoo, M.-H. ; Yeo, G.-S. ; Lee, J.-H. ; Cho, H.-K. ; Han, W.-S. ; Moon, J.-T.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.1082-1090, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
|
2.
|
Conference Proceedings
|
Jung, M.-H. ; Lee, S.-H. ; Kim, H.-W. ; Woo, S.-G. ; Cho, H.-K. ; Han, W.-S.
Pub. info.: |
Advances in Resist Technology and Processing XX. 2 pp.1298-1303, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5039 |
|
3.
|
Conference Proceedings
|
Kim, S.-H. ; Lee, S.-H. ; Yeo, G.-S. ; Lee, J.H. ; Cho, H.-K. ; Han, W.-S. ; Moon, J.-T.
Pub. info.: |
Advances in Resist Technology and Processing XX. 2 pp.940-947, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5039 |
|
4.
|
Conference Proceedings
|
Kim, H.-D. ; Lee, S.-H. ; Choi, S.-J. ; Lee, J.-H. ; Cho, H.-K. ; Han, W.-S. ; Moon, J.-T.
Pub. info.: |
Advances in Resist Technology and Processing XX. 2 pp.827-837, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5039 |
|
5.
|
Conference Proceedings
|
Hong, J. ; Kim, H.-W. ; Lee, S.-H. ; Woo, S.-G. ; Cho, H.-K. ; Han, W.-S.
Pub. info.: |
Advances in Resist Technology and Processing XX. 1 pp.249-256, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5039 |
|