Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.126-135, 2001. Pennington, NJ. Electrochemical Society
Hobart, K.D. ; Kub, F.J. ; Esser, R. ; Jernigan, G.G. ; Fatemi, M. ; Binari, S.C. ; Katzer, D.S. ; Dietrich, H.B. ; Kipshidze, G. ; Nikishin, S. ; Temkin, H.
Pub. info.:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.92-99, 2001. Pennington, NJ. Electrochemical Society