1.
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Conference Proceedings
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Kawaguchi, Y. ; Sasaki, T. ; Irisawa, J. ; Yokokoji, O. ; Irie, S. ; Otoguro, A. ; Itani, T. ; Fujii, K.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.525-532, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
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2.
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Conference Proceedings
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Itakura, Y. ; Kawasa, Y. ; Egawa, K. ; Sumitani, A. ; Sasaki, H. ; Higasikawa, I. ; Irie, S. ; Fujii, K. ; Itani, T. ; Nakano, H. ; Hata, H.
Pub. info.: |
Optical Microlithography XVII. pp.1606-1615, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5377 |
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3.
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Conference Proceedings
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Irie, S. ; Fujii, K. ; Itakura, Y. ; Kawasa, Y. ; Egawa, K. ; Uchino, I. ; Sumitani, A. ; Itani, T.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.226-237, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
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4.
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Conference Proceedings
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Otoguro, A. ; Irie, S. ; Ishimaru, T. ; Suganaga, T. ; Itani, T. ; Fujii, K.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.245-253, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
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5.
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Conference Proceedings
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Takebe, Y. ; Eda, M. ; Okada, S. ; Yokokoji, O. ; Irie, S. ; Otoguro, A. ; Fujii, K. ; Itani, T.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.151-158, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
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6.
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Conference Proceedings
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Otoguro, A. ; Irie, S. ; Itani, T. ; Fujii, K. ; Takebe, Y. ; Kawaguchi, Y. ; Yokokoji, O.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.186-195, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
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