1.
|
Conference Proceedings
|
M. J. Neumann ; M. Cruce ; P. Brown ; S. N. Srivasta ; D. N. Ruzic ; O. Khodykin
Pub. info.: |
Emerging lithographic technologies XI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6517 |
|
2.
|
Conference Proceedings
|
C. R. M. Struck ; M. J. Neumann ; R. Raju ; R. L. Bristol ; D. N. Ruzic
Pub. info.: |
Lithography Asia 2008. 2 pp.71402P-1-71402P-12, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
7140 |
|
3.
|
Conference Proceedings
|
M. J. Neumann ; M. J. Cruce ; D. N. Ruzic
Pub. info.: |
Emerging lithographic technologies XII. 2 pp.69213D-1-69213D-12, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6921 |
|