Pearton, S. J. ; Chakrabarti, U. K. ; Katz, A. ; Ren, F. ; Fullowan, T. R. ; Abernathy, C R. ; Hobson, W. S.
Pub. info.:
Materials modification by energetic atoms and ions : symposium held April 28-30, 1992, San Francisco, California, U.S.A.. pp.17-22, 1992. Pittsburgh, PA. Materials Research Society
Ren, F. ; Pearton, S. J. ; Hobson, W. S. ; Fullowan, T. R. ; Emerson, A. B. ; Yanof, A. W. ; Schleich, D. M.
Pub. info.:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.481-486, 1990. Pittsburgh, Pa.. Materials Research Society