Asayama, E. ; Ono, T. ; Takeshita, M. ; Hourai, M. ; Sano, M. ; Tsuya, H.
Pub. info.:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.546-556, 1998. Pennington, NJ. Electrochemical Society
Ono, T. ; Asayama, E. ; Horie, H. ; Hourai, M. ; Sueoka, K. ; Tsuya, H. ; Rozgonyi, G.A.
Pub. info.:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1113-1125, 1998. Pennington, NJ. Electrochemical Society
Kelly, G. P. ; Hourai, M. ; Umeno, S. ; Sano, M. ; Tsuya, H.
Pub. info.:
Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.21-, 1998. Warrendale, Pa. MRS - Materials Research Society
Hourai, M. ; Ono, T. ; Umeno, S. ; Tanaka, T. ; Asayaoia, E. ; Nishikawa, H. ; Sano, M. ; Tsuya, H.
Pub. info.:
Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany. pp.19-34, 2001. Pennington, N.J.. Electrochemical Society