1.

Conference Proceedings
Conference Proceedings
1. Study of the thermal characteristic of x-ray mask during short-pulsed exposure
H. Shang ; Y. Wang
Pub. info.: Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo -Electronic Technology, and Artificial Intelligence : 13-15 October 2006, Beijing, China.  pp.63573M-1-63573M-5,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6357
2.

Conference Proceedings
Conference Proceedings
2. Research of the impact of slanting installation error of PSD on spot position
H. Shang ; G. Zhang ; Z. Wei ; Y. Wang
Pub. info.: Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo -Electronic Technology, and Artificial Intelligence : 13-15 October 2006, Beijing, China.  pp.63573J-1-63573J-5,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6357
3.

Conference Proceedings
Conference Proceedings
3. Study of x-ray lithography mask distortion during electron-beam writing
H. Shang ; Y. Wang
Pub. info.: Optoelectronic technology and instruments, control theory and automation, and space exploration : Seventh International Symposium on Instrumentation and Control Technology : 10-13 October 2008, Beijing, China.  pp.712909-1-712909-6,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7129