1.

Conference Proceedings
Conference Proceedings
1. Adding grayscale layer to chrome photomasks [6349-117]
Poon, D. K. ; Dykes, J. M. ; Choo, C. ; Tsui, J. T. K. ; Wang, J. ; Chapman, G. H. ; Tu, Y. ; Reynolds, P. ; Zanzal, A.
Pub. info.: Photomask Technology 2006.  pp.634931-634931,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
2.

Conference Proceedings
Conference Proceedings
2. Real-time optical characterization of laser oxidation process in bimetallic direct write gray scale photomasks [6106A-18]
Poon, D. K. ; Chapman, G. H. ; Choo, C. ; Chang, M. ; Wang, J. ; Tu, Y.
Pub. info.: Photon Processing in Microelectronics and Photonics V.  pp.61060G-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6106
3.

Conference Proceedings
Conference Proceedings
3. Laster-induced oxidation of Zn alloy films for direct-write grayscale photomasks [6106A-17]
Wang, J. ; Chang, M. ; Tu, Y. ; Poon, D. K. ; Chapman, G. H. ; Choo, C. ; Peng, J.
Pub. info.: Photon Processing in Microelectronics and Photonics V.  pp.61060F-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6106
4.

Conference Proceedings
Conference Proceedings
4. SESSION 4 DIRECT WRITE
Poon, D. K. ; Chapman, G. H. ; Chang, C. Choo. M. ; Wang, J.
Pub. info.: Photon Processing in Microelectronics and Photonics V.  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6106
5.

Conference Proceedings
Conference Proceedings
5. Expanding grayscale capability of direct-write grayscale photomask by using modified Bi/In compositions [5992-20]
Poon, D. K. ; Chapman, G. H. ; Choo, C. ; Wang, J. ; Tu, Y. ; La haye, M. L.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59920K-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992