1.

Conference Proceedings
Conference Proceedings
1. The effects of chemical gradients and photoresist composition on lithographically generated line edge roughness
Chapman, G. ; Poon, D. ; Choo, C. ; Tu, Y. ; Dykes, J. ; Wang, J. ; Peng, J. ; Lennard, W. ; Kavanagh, K.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.368-379,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
2.

Conference Proceedings
Conference Proceedings
2. Adding grayscale layer to chrome photomasks [6349-117]
Poon, D. K. ; Dykes, J. M. ; Choo, C. ; Tsui, J. T. K. ; Wang, J. ; Chapman, G. H. ; Tu, Y. ; Reynolds, P. ; Zanzal, A.
Pub. info.: Photomask Technology 2006.  pp.634931-634931,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
3.

Conference Proceedings
Conference Proceedings
3. Real-time optical characterization of laser oxidation process in bimetallic direct write gray scale photomasks [6106A-18]
Poon, D. K. ; Chapman, G. H. ; Choo, C. ; Chang, M. ; Wang, J. ; Tu, Y.
Pub. info.: Photon Processing in Microelectronics and Photonics V.  pp.61060G-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6106
4.

Conference Proceedings
Conference Proceedings
4. Laster-induced oxidation of Zn alloy films for direct-write grayscale photomasks [6106A-17]
Wang, J. ; Chang, M. ; Tu, Y. ; Poon, D. K. ; Chapman, G. H. ; Choo, C. ; Peng, J.
Pub. info.: Photon Processing in Microelectronics and Photonics V.  pp.61060F-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6106
5.

Conference Proceedings
Conference Proceedings
5. Expanding grayscale capability of direct-write grayscale photomask by using modified Bi/In compositions [5992-20]
Poon, D. K. ; Chapman, G. H. ; Choo, C. ; Wang, J. ; Tu, Y. ; La haye, M. L.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59920K-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
6.

Conference Proceedings
Conference Proceedings
6. Creating precise 3D microstructures using laser direct-write bimetallic thermal resist grayscale photomasks
Chapman, G.H. ; Dykes, J. ; Poon, D. ; Choo, C. ; Wang, J. ; Peng, J. ; Tu, Y.
Pub. info.: Photon Processing in Microelectronics and Photonics IV.  pp.247-258,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5713