1.

Conference Proceedings
Conference Proceedings
1. STUDY ON GEOMETRY, SURFACE DAMAGE AND RAPID THERMAL ANNEALING OF 300mm AS-CUT SILICON WAFERS
Zhang, G. ; Liu, B. ; Zhao, J. ; Chen, W. ; Wang, J. ; Zhou, Q. ; Tu, H.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.189-193,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
2.

Conference Proceedings
Conference Proceedings
2. GROWTH OF 300mm SILICON SINGLE CRYSTALS IN A 24' HOT ZONE
Tu, H. ; Daj, X. ; Wu, Z. ; Zhang, G. ; Wang, J. ; Fang, F. ; Zhou, Q. ; Xiao, Q.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.182-188,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
3.

Conference Proceedings
Conference Proceedings
3. Strongly luminescent rare-earth-ion-doped DNA-CTMA complex film and fiber materials
Wang, L. ; Ishihara, K. ; Izumi, H. ; Wada, M. ; Zhang, G. ; Ishikawa, T. ; Watanabe, A. ; Horinouchi, S. ; Ogata, N.
Pub. info.: Materials and devices for optical and wireless communications : APOC 2002 : Asia-Pacific Optical and Wireless Communications : 15-18 October, 2002, Shanghai, China.  pp.143-153,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4905
4.

Conference Proceedings
Conference Proceedings
4. Fabrication and characterization of rare-earth-metal-chelate-doped plastic film and fiber materials: Eu(3+)-chelate-doped PMMA
Horinouchi, S. ; Wada, M. ; Ishihara, K. ; Eguchi, M. ; Zhang, G. ; Ishikawa, T. ; Watanabe, A. ; Wang, L. ; Ogata, N.
Pub. info.: Materials and devices for optical and wireless communications : APOC 2002 : Asia-Pacific Optical and Wireless Communications : 15-18 October, 2002, Shanghai, China.  pp.126-134,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4905
5.

Conference Proceedings
Conference Proceedings
5. STUDY ON GEOMETRY, SURFACE DAMAGE AND RAPID THERMAL ANNEALING OF 300mm AS-CUT SILICON WAFERS
Zhang, G. ; Liu, B. ; Zhao, J. ; Chen, W. ; Wang, J. ; Zhou, Q. ; Tu, H.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.189-193,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
6.

Conference Proceedings
Conference Proceedings
6. GROWTH OF 300mm SILICON SINGLE CRYSTALSIN A 24' HOT ZONE
Tu, H. ; Daj, X. ; Wu, Z. ; Zhang, G. ; Wang, J. ; Fang, F. ; Zhou, Q. ; Xiao, Q.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.182-188,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
7.

Conference Proceedings
Conference Proceedings
7. Managed PACS operation with an automatic monitoring tool
Zhang, J. ; Han, R. ; Wu, D. ; Zhang, X. ; Zhuang, J. ; Feng, J. ; Wang, M. ; Zhang, G. ; Wang, C.
Pub. info.: Medical Imaging 2002: PACS and Integrated Medical Information Systems: Design and Evaluation.  pp.326-332,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4685
8.

Conference Proceedings
Conference Proceedings
8. Cr and TaN absorber mask etch CD performance study for extreme-ultraviolet lithography
Zhang, G. ; Yan, P.-Y.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part Two  pp.1092-1098,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
9.

Conference Proceedings
Conference Proceedings
9. Lithographic evaluation of the EUV engineering test stand
Lee, S.H. ; Tichenor, D.A. ; Ballard, W.P. ; Bernardez, L.J, II. ; Goldsmith, J.E.M. ; Haney, S.J. ; Jefferson, K.L. ; Johnson, T.A. ; Leung, A.H. ; O'Connell, D.J. ; Replogle, W.C. ; Wronosky, J.B. ; Blaedel, K.L. ; Naulleau, P.P. ; Goldberg, K.A. ; Gullikson, E.M. ; Chapman, H.N. ; Wurm, S. ; Panning, E.M. ; Yan, P.-Y. ; Zhang, G. ; Bjorkholm, J.E. ; Kubiak, G.D. ; Sweeney, D.W. ; Attwood, D.T. ; Gwyn, C.W.
Pub. info.: Emerging Lithographic Technologies VI.  Part One  pp.266-276,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4688
10.

Conference Proceedings
Conference Proceedings
10. Measurement of the refractive index of biotissue at four laser wavelengths
Cheng, S.Y. ; Shen, H.Y. ; Zhang, G. ; Huang, C.H. ; Huang, X.J.
Pub. info.: Optics in Health Care and Biomedical Optics: Diagnostics and Treatment.  pp.172-176,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4916