1.

Conference Proceedings
Conference Proceedings
1. 'Volcano' Reactions and Step Coverage in Oxide Vias Between Tungsten CVD and Bias SputteredTiN/Ti Films
Herner, S.B. ; Tanaka, Y. ; Zhang, H. ; Littau, K.A. ; Ghanayem, S.G.
Pub. info.: Interconnect and contact metallization for ULSI : proceedings of the international symposium.  pp.22-33,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-31
2.

Conference Proceedings
Conference Proceedings
2. Room Temperature Self-Annealing of Electroplated and Sputtered Copper Films
Chen, M. ; Rengarajan, S. ; Hey, P. ; Dordi, Y. ; Zhang, H. ; Hashim, I. ; Ding, P. ; Chin, B.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.413-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
3.

Conference Proceedings
Conference Proceedings
3. TEM Analyses of Cu-Ta and Cu-TaN Interfaces
Wang, J. Y. P. ; Zhang, H. ; Hashim, I. ; Dixit, G. ; Chen, F.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.293-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
4.

Conference Proceedings
Conference Proceedings
4. Room Temperature Self-Annealing of Electroplated and Sputtered Copper Films
Chen, M. ; Chin, B. ; Ding, P. ; Dordi, Y. ; Hashim, I. ; Hey, P. ; Rengarajan, S. ; Zhang, H.
Pub. info.: Polycrystalline metal and magnetic thin films : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.249-256,  1999.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 562