Jastrzebski, L. ; Henley, W. ; DeBusk, D. ; Haddad, N. ; Lowell, J. ; Wenner, V. ; Nauka, K. ; Persson, E.
Pub. info.:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.530-536, 1994. Pennington, NJ. Electrochemical Society
Yoon, J. U. ; Kim, G. N. ; Krska, J-H. Y. ; Chung, J. E. ; Allen, L. P. ; Goodson, K. ; Kaeding, O. ; Nauka, K.
Pub. info.:
Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A.. pp.193-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society