1.
Conference Proceedings
Lin, C.F. ; Tseng, W.T. ; Feng, M.S. ; Chang, Y.F.
Pub. info.:
Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films . pp.153-163, 1997. Pennington, New Jersey. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-10
2.
Conference Proceedings
Lin, C.F. ; Tseng, W.T. ; Feng, M.S. ; Chang, Y.F. ; Hsie, J.J.
Pub. info.:
Proceedings of the Symposium on Interconnect and Contact Metallization . pp.152-164, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-31