1.

Conference Proceedings
Conference Proceedings
1. Rectifiers for suppressing depolarization caused by differential transmission and phase shift in high NA lenses
Shribak,M.I. ; Inoue,S. ; Oldenbourg,R.
Pub. info.: Polarization analysis, measurement, and remote sensing IV : 29-31 July 2001, San Diego, USA.  pp.163-174,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4481
2.

Conference Proceedings
Conference Proceedings
2. Polysilicon TFT on plastics
Shimoda,T. ; Inoue,S. ; Utsunomiya,S.
Pub. info.: Flat panel display technology and display metrology II : 22-23 January 2001, San Jose, [California] USA.  pp.52-59,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4295
3.

Conference Proceedings
Conference Proceedings
3. Measurement of transmittance variation of projection lenses depending on the light paths using a grating-pinhole mask
Sato,K. ; Inoue,S.
Pub. info.: Optical Microlithography XIV.  4346  pp.379-386,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
4.

Conference Proceedings
Conference Proceedings
4. Automatic tracking sensor camera system
Tsuda,T. ; Kato,D. ; Ishikawa,A. ; Inoue,S.
Pub. info.: Machine Vision Applications in Industrial Inspection IX.  pp.144-153,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4301
5.

Conference Proceedings
Conference Proceedings
5. Improvement of photomask repeater for 130-nm lithography
Kyoh,S. ; Inoue,S. ; Mori,I. ; Irie,N. ; Ishii,Y. ; Umatate,T. ; Kokubo,H. ; Hayashi,N.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  pp.277-286,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409