Roberts, J.C. ; Rajagopal, P. ; Cook, J.W.Jr. ; Therrien, R.J. ; Piner, E.L. ; Linthicum, K.J. ; Hobart, K.D. ; Twigg, M. ; Mittereder, J. ; Binari, S. ; Kub, F.J.
Pub. info.:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.151-156, 2005. Pennington, NJ. Electrochemical Society
Feygelson, T.I. ; Hobart, K.D. ; Ancona, M. ; Kub, F.J. ; Butler, J.E.
Pub. info.:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.439-449, 2005. Pennington, NJ. Electrochemical Society