Souifi, A. ; Bremond, G. ; Benyattou, T. ; Guillot, G. ; Dutartre, D.
Pub. info.:
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.247-252, 1992. Pittsburgh, Pa.. Materials Research Society