1.
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Conference Proceedings
|
Hyun, Y.-S. ; Kim, D.-J. ; Koh, C.-W. ; Park, S.-N. ; Kwon, W.-T.
Pub. info.: |
Optical Microlithography XVI. Part Two pp.941-947, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5040 |
|
2.
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Conference Proceedings
|
Koh, C.-W. ; Lee, D.-H. ; Kim, M.-S. ; Park, S.-N. ; Kwon, W.-T.
Pub. info.: |
Advances in Resist Technology and Processing XX. 2 pp.1382-1389, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5039 |
|