Scheuring, G. ; Petrashenko, A. ; Doebereiner, S. ; Hillmann, F. ; Brucek, H.-J. ; Hourd, A.C. ; Grimshaw, A. ; Hughes, G. ; Chen, S.-B. ; Chen, P.W. ; Schaetz, T. ; Struck, T. ; Van Adrichem, P.J.M. ; Boerland, H. ; Lehnigk, S.
Pub. info.:
19th European Conference on Mask Technology for Integrated Circuits and Microcomponents. pp.138-147, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering