1.

Conference Proceedings
Conference Proceedings
1. A novel system to measure MEMS motion
Leng, C. ; Zhang, G. ; Yu, F. ; Jiang, C. ; Zhong, Y.
Pub. info.: MEMS/MOEMS Technologies and Applications II.  pp.246-254,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5641
2.

Conference Proceedings
Conference Proceedings
2. MEMS motion measurement system using differential laser Doppler and its key techniques [6344-93]
Leng, C. ; Zhang, G. ; Zhong, Y. ; Hong, X. ; Jiang, C.
Pub. info.: Advanced Laser Technologies 2005.  pp.63442L-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6344
3.

Conference Proceedings
Conference Proceedings
3. Study on MEMS optical measurement system
Leng, C. ; Zhang, G. ; Yu, F. ; Jiang, C. ; Zhong, Y.
Pub. info.: Optical Transmission, Switching, and Subsystems II.  pp.405-412,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5625