1.

Conference Proceedings
Conference Proceedings
1. Static EUV micro-exposures using the ETS Set-2 optics
Naulleau, P.P. ; Goldberg, K.A. ; Anderson, E.H. ; Bokor, J. ; Harteneck, B.D. ; Jackson, K.H. ; Olynick, D.L. ; Salmassi, F. ; Baker, S.L. ; Mirkarimi, P.B. ; Spiller, E.A. ; Walton, C.C. ; O'Connell, D.J. ; Yan, P.-Y. ; Zhang, G.
Pub. info.: Emerging Lithographic Technologies VII.  1  pp.36-46,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5037
2.

Conference Proceedings
Conference Proceedings
2. EUVL mask with Ru ML capping
Yan, P.-Y. ; Zhang, G. ; Chegwidden, S. ; Spiller, E.A. ; Mirkarimi, P.B.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.1281-1286,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256