1.

Conference Proceedings
Conference Proceedings
1. Across wafer focus mapping and its applications in advanced technology nodes [6154-23]
Zhang, G. ; DeMoor, S. ; Jessen, S. ; He, Q. ; Yan, W. ; Chevacharoenkul, S. ; Vellanki, V. ; Reynolds, P. ; Ganeshan, J. ; Hauschild, J. ; Pieters, M.
Pub. info.: Optical Microlithography XIX.  pp.61540N-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
2.

Conference Proceedings
Conference Proceedings
2. Practical approach to full-field wavefront aberration measurement using phase wheel targets [6154-35]
Zavyalova, L. V. ; Smith, B. W. ; Bourov, A. ; Zhang, G. ; Vellanki, V. ; Reynolds, P. ; Flagello, D. G.
Pub. info.: Optical Microlithography XIX.  pp.61540Y-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154