1.

Conference Proceedings
Conference Proceedings
1. Scatterometer-based scanner fingerprinting technique(ScatterLith) and its applications in image field and ACLV analysis
Wang, C. ; Zhang, G. ; DeMoor, S.J. ; Boehm, M.A. ; Littau, M.E. ; Raymond, C.J.
Pub. info.: Optical Microlithography XVI.  Part One  pp.541-552,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
2.

Conference Proceedings
Conference Proceedings
2. Evaluating scanner lens spherical aberration using scatterometer
Wang, C. ; Zhang, G. ; Tan, C.L. ; Atkinson, C. ; Boehm, M.A. ; Brown, J.M. ; Godfrey, D. ; Littau, M.E. ; Raymond, C.J.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1456-1464,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040