Yan, P.-Y. ; Zhang, G. ; Spiller, E. ; Mirkarimi, P.B.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology XI. pp.824-831, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering