Zhang, G. ; Liu, B. ; Zhao, J. ; Chen, W. ; Wang, J. ; Zhou, Q. ; Tu, H.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.189-193, 2002. Pennington, NJ. Electrochemical Society
Zhang, G. ; Liu, B. ; Zhao, J. ; Chen, W. ; Wang, J. ; Zhou, Q. ; Tu, H.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.189-193, 2002. Pennington, NJ. Electrochemical Society