1.

Conference Proceedings
Conference Proceedings
1. Illumination pupil fill measurement and analysis and its application in scanner V-H bias characterization for 130-nm node and beyond
Zhang, G. ; Wang, C. ; Tan, C.L. ; Ilzhoefer, J.R. ; Atkinson, C. ; Renwick, S.P. ; Slonaker, S.D. ; Godfrey, D. ; Fruga, C.H.
Pub. info.: Optical Microlithography XVI.  Part One  pp.45-56,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
2.

Conference Proceedings
Conference Proceedings
2. Evaluating scanner lens spherical aberration using scatterometer
Wang, C. ; Zhang, G. ; Tan, C.L. ; Atkinson, C. ; Boehm, M.A. ; Brown, J.M. ; Godfrey, D. ; Littau, M.E. ; Raymond, C.J.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1456-1464,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
3.

Conference Proceedings
Conference Proceedings
3. Characterization of ACLV for advanced technology nodes using scatterometer-based lens fingerprinting technique
Wang, C.A. ; Zhang, G. ; DeMoor, S. ; Tan, C. ; Ilzhoefer, J. ; Atkinson, C. ; Wickman, C. ; Hansen, S. ; Geh, B. ; Flagello, D.G. ; Boehm, M.
Pub. info.: Optical Microlithography XVII.  pp.581-590,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377