Kurose, E. ; Watanabe, K. ; Suganaga, T. ; Itani, T. ; Fujii, K.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology XI. pp.603-614, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering