1.

Conference Proceedings
Conference Proceedings
1. CHARACTERIZATION OF HOT-PRESSED SILICON NITRIDE CERAMICS WITH ALKOXIDE-DERIVED OXIDE MIXTURES AS THE SINTERING AID
Sato, Y. ; Sakurai, C. ; Ueki, M. ; Sugita, K.
Pub. info.: Silicon nitride ceramics : scientific and technological advances : symposium held November 30-December 3,1992, Boston, Massachusetts, U.S.A..  pp.429-434,  1993.  Pittsburgh.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 287
2.

Conference Proceedings
Conference Proceedings
2. *PHOTO-EXCITED CLEANING OF SILICON WITH CHLORINE AND FLUORINE
Ito, T. ; Sugino, R. ; Sato, Y. ; Okuno, M. ; Osawa, A. ; Aoyama, T. ; Yamazaki, T. ; Arimoto, Y.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.195-206,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
3.

Conference Proceedings
Conference Proceedings
3. Application of polysilanes for deep-UV antireflective coating
Onishi, Y. ; Sato, Y. ; Shiobara, E. ; Miyoshi, S. ; Matsuyama, H. ; Abe, J. ; Ichinose, H. ; Ohiwa, T. ; Nakano, Y. ; Yoshikawa, S. ; Hayase, S.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.205-213,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
4.

Conference Proceedings
Conference Proceedings
4. Electrochemical Properties of Nb3Cl8 in the MgCl2-NaCl Eutectic at 471℃
Sato, Y. ; Iwabuchi, K. ; Kawaguchi, N. ; Zhu, H. ; Endo, M. ; Yamamura, T. ; Saito, S.
Pub. info.: Proceedings of the tenth International Symposium on Molten Salts.  pp.189-203,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-7
5.

Conference Proceedings
Conference Proceedings
5. A Study of Etching Mechanism in Silicon-HCl System Using Fast Wafer Rotation
Kataoka, T. ; Sato, Y. ; Ohmine, T.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.1319-1326,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25
6.

Conference Proceedings
Conference Proceedings
6. Metal Clad Layer Formation for CMOSFETs/SIMOX by Selective Chemical Vapor Deposition of Tungsten
Ishii, H. ; Sato, Y. ; Kosugi, T. ; Arita, Y. ; Maeda, M.
Pub. info.: Interconnect and contact metallization for ULSI : proceedings of the international symposium.  pp.10-21,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-31
7.

Conference Proceedings
Conference Proceedings
7. Amperometric Enzyme Electrode Using Polyion Complexes as the Enzyme Matrices
Mizutani, F. ; Sato, Y. ; Yabuki, S. ; Hirata, Y.
Pub. info.: Proceedings of the Symposium on Chemical and Biological Sensors and Analytical Electrochemical Methods.  pp.1028-1038,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-19
8.

Conference Proceedings
Conference Proceedings
8. 5 Electrochromism in Nickel Oxide Films Prepared by the Oxidation of Nickel-Carbon Composite Films
Sato, Y. ; Tamura, S. ; Murai, K.
Pub. info.: Proceedings of the Third Symposium on Electrochromic Materials.  pp.64-78,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-24
9.

Conference Proceedings
Conference Proceedings
9. Viscosity of AlCl3-LiCl-NaCl Acidic Ternary Melt
Sato, Y. ; Uda, M. ; Nagatani, A. ; Yamamura, T.
Pub. info.: Proceedings of the eleventh International Symposium on Molton [i.e. Molten] Salts XI.  pp.527-535,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-11
10.

Conference Proceedings
Conference Proceedings
10. Self-Assembled Monolayer as a Mediator and Barrier for Electron Transfer between Electrodes and Redox Species in Solution
Sato, Y. ; Uosaki, K.
Pub. info.: Proceedings of the fifth International Symposium on Redox Mechanisms and Interfacial Properties of Molecules of Biological Importance 1993.  pp.299-310,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-11