1.

Technical Paper

Technical Paper
Matsumoto, A. ; Aso, S. ; Suzuki, Y. ; Morioka, T. ; Honma, H.
Pub. info.: AIAA paper.  pp.1-8,  2000.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 2000
2.

Conference Proceedings

Conference Proceedings
Biro, R. ; Sone, K. ; Niisaka, S. ; Otani, M. ; Suzuki, Y. ; Ouchi, C. ; Saito, T. ; Hasegawa, M. ; Saito, J. ; Tanaka, A. ; Matsumoto, A.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1625-1634,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691