1.

Conference Proceedings
Conference Proceedings
1. Improvement of the lifetime of the optical coatings under high power laser irradiations
Biro, R. ; Ito, T. ; Kuwabara, S. ; Fukushima, H. ; Akiba, H. ; Banno, K. ; Suzuki, Y. ; Otani, M. ; Sone, K.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1304-1311,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. Development of low-loss optical coatings for 157-nm lithography
Biro, R. ; Sone, K. ; Niisaka, S. ; Otani, M. ; Suzuki, Y. ; Ouchi, C. ; Saito, T. ; Hasegawa, M. ; Saito, J. ; Tanaka, A. ; Matsumoto, A.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1625-1634,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691