1.
Conference Proceedings
L. Van Look ; J. Bekaert ; P. De Bisschop ; J. Van de Kerkhove ; G. Vandenberghe
Pub. info.:
Optical Microlithography XXI . 2 pp.69241Q-1-69241Q-12, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6924
2.
Conference Proceedings
V. Philipsen ; P. De Bisschop ; K. Mesuda
Pub. info.:
Photomask and next-generation lithography mask technology XV . 1 pp.702815-1-702815-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7028
3.
Conference Proceedings
J. Bekaert ; L. Van Look ; P. De Bisschop ; J. Van de Kerkhove ; G. Vandenberghe
Pub. info.:
Lithography Asia 2008 . 2 pp.714027-1-714027-11, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7140
4.
Conference Proceedings
P. De Bisschop ; V. Philipsen ; R. Birkner ; U. Buttgereit ; R. Richter
Pub. info.:
Photomask technology 2007 . 1 pp.67301G-1-67301G-12, 2007. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6730
5.
Conference Proceedings
V. Philipsen ; K. Mesuda ; P. De Bisschop ; A. Erdmann ; G. Citarella
Pub. info.:
Photomask technology 2007 . 1 pp.67301N-1-67301N-12, 2007. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6730